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rdf:type
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Description
| - Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.
- Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study. (en)
- Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study. (cs)
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Title
| - Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings
- Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings (en)
- Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings (cs)
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skos:prefLabel
| - Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings
- Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings (en)
- Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings (cs)
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skos:notation
| - RIV/00216224:14310/01:00004228!RIV08-MSM-14310___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GA202/99/P064), P(VS96102)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216224:14310/01:00004228
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - reflectivity; xrr; x-uv optics; gratings; w/si; x-ray (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - GB - Spojené království Velké Británie a Severního Irska
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Baumbach, T.
- Mikulík, Petr
- Jergel, M.
- Ortega, L.
- Kostič, I.
- Majková, E.
- Hudek, P.
- Luby, Š.
- Pinčík, E.
- Tucoulou, R.
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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