About: Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

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About: Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study. Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study. (en) Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study. (cs)
Title	Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings (en) Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings (cs)
skos:prefLabel	Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings (en) Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings (cs)
skos:notation	RIV/00216224:14310/01:00004228!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany	A188
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA202/99/P064), P(VS96102)
http://linked.open...iv/cisloPeriodika	10A
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Mikulík, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	676458
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/01:00004228
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	reflectivity; xrr; x-uv optics; gratings; w/si; x-ray (en)
http://linked.open.../riv/klicoveSlovo	gratings reflectivity w/si x-uv optics xrr x-ray
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[14D7A04D7B9F]
http://linked.open...i/riv/nazevZdroje	J. Phys. D: Appl. Phys.
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	10 (xsd:int)
http://linked.open...vavai/riv/projekt	Study of the interface morphology in epitaxial multilayers by X-ray reflection Laboratory of thin films and nanostructures
http://linked.open...UplatneniVysledku	2001
http://linked.open...v/svazekPeriodika	34
http://linked.open...iv/tvurceVysledku	Baumbach, T. Mikulík, Petr Jergel, M. Ortega, L. Kostič, I. Majková, E. Hudek, P. Luby, Š. Pinčík, E. Tucoulou, R.
issn	0022-3727
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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