About: Implementation of multi-opening orifices in the primary metrology of vacuums and small gas throughputs     Goto   Sponge   NotDistinct   Permalink

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Description
  • A multi-opening orifice is a device for the primary measurement of gas flows and related vacuum quantities. This device maintains a constant molecular flow regime and thus the possibility to very accurately calculate the conductance from the geometrical dimensions for relatively high pressures, and the value of the conductance is sufficiently high to achieve reasonable parameters of the vacuum system in use. Suitable shapes of a multi-opening orifice duct and the principles of multi-opening orifice design are discussed. An example of the multi-opening orifice manufactured with grinding is given. The limits and requirements for further development are drafted. (C) 2013 Elsevier Ltd. All rights reserved.
  • A multi-opening orifice is a device for the primary measurement of gas flows and related vacuum quantities. This device maintains a constant molecular flow regime and thus the possibility to very accurately calculate the conductance from the geometrical dimensions for relatively high pressures, and the value of the conductance is sufficiently high to achieve reasonable parameters of the vacuum system in use. Suitable shapes of a multi-opening orifice duct and the principles of multi-opening orifice design are discussed. An example of the multi-opening orifice manufactured with grinding is given. The limits and requirements for further development are drafted. (C) 2013 Elsevier Ltd. All rights reserved. (en)
Title
  • Implementation of multi-opening orifices in the primary metrology of vacuums and small gas throughputs
  • Implementation of multi-opening orifices in the primary metrology of vacuums and small gas throughputs (en)
skos:prefLabel
  • Implementation of multi-opening orifices in the primary metrology of vacuums and small gas throughputs
  • Implementation of multi-opening orifices in the primary metrology of vacuums and small gas throughputs (en)
skos:notation
  • RIV/00216208:11320/14:10288894!RIV15-MSM-11320___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, N, V
http://linked.open...iv/cisloPeriodika
  • březen
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 20865
http://linked.open...ai/riv/idVysledku
  • RIV/00216208:11320/14:10288894
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Gas throughput; Orifice flow standard; Multi-opening orifice; Orifice (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [4E89228AF6F4]
http://linked.open...i/riv/nazevZdroje
  • Vacuum
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 101
http://linked.open...iv/tvurceVysledku
  • Gronych, Tomáš
  • Jeřáb, Martin
  • Krajíček, Z.
  • Peksa, Ladislav
  • Prazak, D.
  • Stanek, F.
  • Vičar, Martin
http://linked.open...ain/vavai/riv/wos
  • 000330143000071
issn
  • 0042-207X
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.vacuum.2013.10.014
http://localhost/t...ganizacniJednotka
  • 11320
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