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Description
  • In this article we present Langmuir probe characteristics measured in hollow cathode plasma jet system powered by RF (radiofrequency) generator on frequency 13.56 MHz. Data were obtained in argon and in argon with admixture of iodine I2. First results show the effect of negative iodine ions present in plasma.
  • In this article we present Langmuir probe characteristics measured in hollow cathode plasma jet system powered by RF (radiofrequency) generator on frequency 13.56 MHz. Data were obtained in argon and in argon with admixture of iodine I2. First results show the effect of negative iodine ions present in plasma. (en)
Title
  • Langmuir Probe Measurements in Electronegative RF Plasma
  • Langmuir Probe Measurements in Electronegative RF Plasma (en)
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  • Langmuir Probe Measurements in Electronegative RF Plasma
  • Langmuir Probe Measurements in Electronegative RF Plasma (en)
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  • RIV/00216208:11320/13:10192446!RIV14-MSM-11320___
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  • 84270
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  • RIV/00216208:11320/13:10192446
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  • Electronegative RF plasma; Langmuir probe (en)
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  • [772668F0B977]
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  • Praha
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  • Praha
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  • WDS'13 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
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  • Kudrna, Pavel
  • Picková, Irena
  • Tichý, Milan
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number of pages
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  • Matfyzpress
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  • 978-80-7378-251-1
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  • 11320
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