About: Role of oxygen admixture in stabilizing TiO (x) nanoparticle deposition from a gas aggregation source

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://dx.doi.org/10.1007/s11051-013-2125-0
Description	For the use of a gas aggregation cluster source a high and stable deposition rate is desired. For many metals, nanoparticle formation is enhanced by admixture of reactive gases. Here, the role of reactive gas admixtures on the nanoparticle deposition rates is investigated for the case of reactive direct current magnetron sputtering of Ti in a gas aggregation chamber. The results show that, at low working gas (argon) pressures, stable cluster deposition at high rates can only be achieved for admixtures with a very narrow oxygen flow range. At higher pressures, stable deposition can be observed only after an intermediate maximum rate has been crossed or a stable deposition rate is not reached at all. For the different sputtering conditions, the partial pressure of oxygen was monitored with a mass spectrometer. The results are explained in terms of the competing roles of oxygen in cluster nucleation as well as in target poisoning. The cluster size distributions for different conditions were characterized by scanning electron microscopy. For the use of a gas aggregation cluster source a high and stable deposition rate is desired. For many metals, nanoparticle formation is enhanced by admixture of reactive gases. Here, the role of reactive gas admixtures on the nanoparticle deposition rates is investigated for the case of reactive direct current magnetron sputtering of Ti in a gas aggregation chamber. The results show that, at low working gas (argon) pressures, stable cluster deposition at high rates can only be achieved for admixtures with a very narrow oxygen flow range. At higher pressures, stable deposition can be observed only after an intermediate maximum rate has been crossed or a stable deposition rate is not reached at all. For the different sputtering conditions, the partial pressure of oxygen was monitored with a mass spectrometer. The results are explained in terms of the competing roles of oxygen in cluster nucleation as well as in target poisoning. The cluster size distributions for different conditions were characterized by scanning electron microscopy. (en)
Title	Role of oxygen admixture in stabilizing TiO (x) nanoparticle deposition from a gas aggregation source Role of oxygen admixture in stabilizing TiO (x) nanoparticle deposition from a gas aggregation source (en)
skos:prefLabel	Role of oxygen admixture in stabilizing TiO (x) nanoparticle deposition from a gas aggregation source Role of oxygen admixture in stabilizing TiO (x) nanoparticle deposition from a gas aggregation source (en)
skos:notation	RIV/00216208:11320/13:10191040!RIV14-MSM-11320___
http://linked.open...avai/riv/aktivita	I
http://linked.open...avai/riv/aktivity	I
http://linked.open...iv/cisloPeriodika	12
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Polonskyi, Oleksandr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Karlova v Praze / Matematicko-fyzikální fakulta
http://linked.open...dnocenehoVysledku	103351
http://linked.open...ai/riv/idVysledku	RIV/00216208:11320/13:10191040
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Cluster deposition; Aerosol nucleation; Reactive sputtering; Nanocluster; Stabilization (en)
http://linked.open.../riv/klicoveSlovo	Stabilization Aerosol nucleation Cluster deposition Nanocluster Reactive sputtering
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[9446F4649D85]
http://linked.open...i/riv/nazevZdroje	Journal of Nanoparticle Research
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	15
http://linked.open...iv/tvurceVysledku	Zaporojtchenko, Vladimir Polonskyi, Oleksandr Ahadi, Amir Mohammad Faupel, Franz Peter, Tilo Strunskus, Thomas
http://linked.open...ain/vavai/riv/wos	000327525400001
issn	1388-0764
number of pages	11 (xsd:int)
http://bibframe.org/vocab/doi	10.1007/s11051-013-2125-0
http://localhost/t...ganizacniJednotka	11320

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