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Description
  • We review recent advances in optical and magnetooptical (MO) scatterometry applied to periodically ordered nanostructures such as periodically patterned lines, wires, dots, or holes.. e techniques are based on spectroscopic ellipsometry (SE), either in the basic or generalized modes, Mueller matrix polarimetry, and MO spectroscopy mainly based on MO Kerr effect measurements. We briefly present experimental setups, commonly used theoretical approaches, and experimental results obtained by SE and MO spectroscopic analyses of various samples. The reviewed analyses are mainly related to monitoring optical critical dimensions such as the widths, depths, and periods of the patterned elements, their real shapes, and their line edge or linewidth roughness. We also discuss the advantages and disadvantages of the optical spectroscopic techniques compared to direct monitoring techniques.
  • We review recent advances in optical and magnetooptical (MO) scatterometry applied to periodically ordered nanostructures such as periodically patterned lines, wires, dots, or holes.. e techniques are based on spectroscopic ellipsometry (SE), either in the basic or generalized modes, Mueller matrix polarimetry, and MO spectroscopy mainly based on MO Kerr effect measurements. We briefly present experimental setups, commonly used theoretical approaches, and experimental results obtained by SE and MO spectroscopic analyses of various samples. The reviewed analyses are mainly related to monitoring optical critical dimensions such as the widths, depths, and periods of the patterned elements, their real shapes, and their line edge or linewidth roughness. We also discuss the advantages and disadvantages of the optical spectroscopic techniques compared to direct monitoring techniques. (en)
Title
  • Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays
  • Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays (en)
skos:prefLabel
  • Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays
  • Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays (en)
skos:notation
  • RIV/00216208:11320/13:10190413!RIV14-GA0-11320___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(GPP204/10/P346)
http://linked.open...iv/cisloPeriodika
  • 2013
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 59648
http://linked.open...ai/riv/idVysledku
  • RIV/00216208:11320/13:10190413
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • polarization; permalloy; domain method; diffraction gratings; generalized ellipsometry; critical dimension; spectroscopic ellipsometry; line edge roughness; atomic-force microscopy; coupled-wave analysis (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [414FE9B7BB50]
http://linked.open...i/riv/nazevZdroje
  • Journal of Nanomaterials
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 2013
http://linked.open...iv/tvurceVysledku
  • Antoš, Roman
  • Veis, Martin
http://linked.open...ain/vavai/riv/wos
  • 000314423400001
issn
  • 1687-4110
number of pages
http://bibframe.org/vocab/doi
  • 10.1155/2013/621531
http://localhost/t...ganizacniJednotka
  • 11320
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