About: The misfit dislocation density profile in graded SiGe/Si(001) layers prepared at different temperatures     Goto   Sponge   NotDistinct   Permalink

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Description
  • We present a generalization of the Dodson-Tsao kinematic model of misfit dislocation for graded SixGe1-x/Si(001) layers. The layers were prepared under different growing conditions (temperature). The misfit dislocation distribution has been determined by means of high-resolution x-ray scattering. Analysis of the reciprocal space maps was compared with the kinematic Dodson-Tsao model and the equilibrium Tersoff model.
  • We present a generalization of the Dodson-Tsao kinematic model of misfit dislocation for graded SixGe1-x/Si(001) layers. The layers were prepared under different growing conditions (temperature). The misfit dislocation distribution has been determined by means of high-resolution x-ray scattering. Analysis of the reciprocal space maps was compared with the kinematic Dodson-Tsao model and the equilibrium Tersoff model. (en)
Title
  • The misfit dislocation density profile in graded SiGe/Si(001) layers prepared at different temperatures
  • The misfit dislocation density profile in graded SiGe/Si(001) layers prepared at different temperatures (en)
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  • The misfit dislocation density profile in graded SiGe/Si(001) layers prepared at different temperatures
  • The misfit dislocation density profile in graded SiGe/Si(001) layers prepared at different temperatures (en)
skos:notation
  • RIV/00216208:11320/13:10139997!RIV14-GA0-11320___
http://linked.open...avai/riv/aktivita
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  • I, P(GAP108/11/1312), P(GD202/09/H041), S
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  • 17
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  • 88527
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  • RIV/00216208:11320/13:10139997
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  • temperatures; different; prepared; layers; SiGe/Si001; graded; profile; density; dislocation; misfit (en)
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  • GB - Spojené království Velké Británie a Severního Irska
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  • [1A8A12E5C8FC]
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  • Journal of Physics Condensed Matter
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  • 25
http://linked.open...iv/tvurceVysledku
  • Daniš, Stanislav
  • Endres, Jan
  • Bauer, G.
http://linked.open...ain/vavai/riv/wos
  • 000317463100010
issn
  • 0953-8984
number of pages
http://bibframe.org/vocab/doi
  • 10.1088/0953-8984/25/17/175802
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  • 11320
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