Attributes | Values |
---|
rdf:type
| |
rdfs:seeAlso
| |
Description
| - Atomic force microscopy and its advantages and disadvantages are presented in comparison with optical techniques (near-field optical microscopy and optical spectroscopic scatterometry), as well as their mutual cooperation. The methods are analyzed with respect to monitoring rough surfaces, critical dimensions and cross-sectional shapes of patterned nanostructures, and the linewidth and line-edge roughness of patterned elements.
- Atomic force microscopy and its advantages and disadvantages are presented in comparison with optical techniques (near-field optical microscopy and optical spectroscopic scatterometry), as well as their mutual cooperation. The methods are analyzed with respect to monitoring rough surfaces, critical dimensions and cross-sectional shapes of patterned nanostructures, and the linewidth and line-edge roughness of patterned elements. (en)
|
Title
| - Atomic Force Microscopy in Optical Imaging and Characterization
- Atomic Force Microscopy in Optical Imaging and Characterization (en)
|
skos:prefLabel
| - Atomic Force Microscopy in Optical Imaging and Characterization
- Atomic Force Microscopy in Optical Imaging and Characterization (en)
|
skos:notation
| - RIV/00216208:11320/12:10129409!RIV13-GA0-11320___
|
http://linked.open...avai/riv/aktivita
| |
http://linked.open...avai/riv/aktivity
| - P(GP202/09/P355), P(GPP204/10/P346), Z(MSM0021620834)
|
http://linked.open...vai/riv/dodaniDat
| |
http://linked.open...aciTvurceVysledku
| |
http://linked.open.../riv/druhVysledku
| |
http://linked.open...iv/duvernostUdaju
| |
http://linked.open...titaPredkladatele
| |
http://linked.open...dnocenehoVysledku
| |
http://linked.open...ai/riv/idVysledku
| - RIV/00216208:11320/12:10129409
|
http://linked.open...riv/jazykVysledku
| |
http://linked.open.../riv/klicovaSlova
| - line-edge roughness; critical dimensions; spectroscopic scatterometry; near-field microscopy; AFM (en)
|
http://linked.open.../riv/klicoveSlovo
| |
http://linked.open...ontrolniKodProRIV
| |
http://linked.open...i/riv/mistoVydani
| |
http://linked.open...vEdiceCisloSvazku
| - Atomic Force Microscopy, 3
|
http://linked.open...i/riv/nazevZdroje
| - Atomic Force Microscopy - Imaging, Measuring and Manipulating Surfaces at the Atomic Scale
|
http://linked.open...in/vavai/riv/obor
| |
http://linked.open...ichTvurcuVysledku
| |
http://linked.open...v/pocetStranKnihy
| |
http://linked.open...cetTvurcuVysledku
| |
http://linked.open...vavai/riv/projekt
| |
http://linked.open...UplatneniVysledku
| |
http://linked.open...iv/tvurceVysledku
| - Antoš, Roman
- Veis, Martin
|
http://linked.open...n/vavai/riv/zamer
| |
number of pages
| |
http://bibframe.org/vocab/doi
| |
http://purl.org/ne...btex#hasPublisher
| |
https://schema.org/isbn
| |
http://localhost/t...ganizacniJednotka
| |