About: Etching behavior of GaAs, GaSb, InAs, and InSb in aqueous H2O2-HBr-ethylene glycol solutions     Goto   Sponge   NotDistinct   Permalink

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Description
  • The chemical interaction of GaAs, GaSb, InAs, and InSb single crystals with H2O2-HBr-ethylene glycol bromine-releasing etchants has been studied under reproducible hydrodynamic conditions. We have located boundaries between regions of polishing and nonpolishing solutions, assessed the surface condition of the crystals using microstructural analysis and surface profiling, and optimized the compositions of the polishing solutions and dynamic chemical polishing conditions for the materials studied.
  • The chemical interaction of GaAs, GaSb, InAs, and InSb single crystals with H2O2-HBr-ethylene glycol bromine-releasing etchants has been studied under reproducible hydrodynamic conditions. We have located boundaries between regions of polishing and nonpolishing solutions, assessed the surface condition of the crystals using microstructural analysis and surface profiling, and optimized the compositions of the polishing solutions and dynamic chemical polishing conditions for the materials studied. (en)
Title
  • Etching behavior of GaAs, GaSb, InAs, and InSb in aqueous H2O2-HBr-ethylene glycol solutions
  • Etching behavior of GaAs, GaSb, InAs, and InSb in aqueous H2O2-HBr-ethylene glycol solutions (en)
skos:prefLabel
  • Etching behavior of GaAs, GaSb, InAs, and InSb in aqueous H2O2-HBr-ethylene glycol solutions
  • Etching behavior of GaAs, GaSb, InAs, and InSb in aqueous H2O2-HBr-ethylene glycol solutions (en)
skos:notation
  • RIV/00216208:11320/12:10127058!RIV13-GA0-11320___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(GAP102/10/0148)
http://linked.open...iv/cisloPeriodika
  • 9
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...dnocenehoVysledku
  • 134832
http://linked.open...ai/riv/idVysledku
  • RIV/00216208:11320/12:10127058
http://linked.open...riv/jazykVysledku
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  • surface roughness; H2O2-HBr-ethylene glycol; InSb; InAs; GaSb; GaAs; Chemical etching (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • RU - Ruská federace
http://linked.open...ontrolniKodProRIV
  • [A1623083DCA5]
http://linked.open...i/riv/nazevZdroje
  • Inorganic Materials
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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  • 48
http://linked.open...iv/tvurceVysledku
  • Moravec, Pavel
  • Okrepka, G. M.
  • Shelyuk, I. A.
  • Stratiichuk, I. B.
  • Tomashik, V. N.
  • Tomashik, Zinajda F.
http://linked.open...ain/vavai/riv/wos
  • 000307562400002
issn
  • 0020-1685
number of pages
http://bibframe.org/vocab/doi
  • 10.1134/S002016851208016X
http://localhost/t...ganizacniJednotka
  • 11320
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