About: XRD total pattern fitting applied to study of microstructure of TiO2 films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	New XRD total pattern fitting software MSTRUCT was used to study the microstructure of magnetron-deposited TiO2 thin films. MSTRUCT is an extension of the FOX program for structure determination from powder diffraction data. MSTRUCT makes corrections for refraction and absorption, residual stress, and preferred orientation that are necessary for thin-film analysis using the parallel-beam geometry and an asymmetric detector scan with small angles of incidence. The program also corrects for crystallite size broadening in terms of log-normal distribution, two models of strain phenomenological and dislocation models, as well as the influence of stacking faults in the most common cubic and hexagonal structures. The results show that during crystallization of the amorphous TiO2 films, tensile stresses were generated resulting in anisotropic shifts of diffraction peaks. The consideration of the stress effect in terms of the weighted Reuss-Voigt model improved the fits significantly. New XRD total pattern fitting software MSTRUCT was used to study the microstructure of magnetron-deposited TiO2 thin films. MSTRUCT is an extension of the FOX program for structure determination from powder diffraction data. MSTRUCT makes corrections for refraction and absorption, residual stress, and preferred orientation that are necessary for thin-film analysis using the parallel-beam geometry and an asymmetric detector scan with small angles of incidence. The program also corrects for crystallite size broadening in terms of log-normal distribution, two models of strain phenomenological and dislocation models, as well as the influence of stacking faults in the most common cubic and hexagonal structures. The results show that during crystallization of the amorphous TiO2 films, tensile stresses were generated resulting in anisotropic shifts of diffraction peaks. The consideration of the stress effect in terms of the weighted Reuss-Voigt model improved the fits significantly. (en)
Title	XRD total pattern fitting applied to study of microstructure of TiO2 films XRD total pattern fitting applied to study of microstructure of TiO2 films (en)
skos:prefLabel	XRD total pattern fitting applied to study of microstructure of TiO2 films XRD total pattern fitting applied to study of microstructure of TiO2 films (en)
skos:notation	RIV/00216208:11320/10:10057500!RIV11-MSM-11320___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA100100729), P(KAN400720701), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Matěj, Zdeněk Kužel, Radomír Nichtová, Lea
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Karlova v Praze / Matematicko-fyzikální fakulta
http://linked.open...dnocenehoVysledku	299070
http://linked.open...ai/riv/idVysledku	RIV/00216208:11320/10:10057500
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	films; TiO2; microstructure; study; applied; fitting; pattern; total; XRD (en)
http://linked.open.../riv/klicoveSlovo	total fitting TiO2 XRD films microstructure pattern study applied
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[6F7A25CCBBCC]
http://linked.open...i/riv/nazevZdroje	Powder Diffraction
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Development of novel hybrid deposition techniques for preparation of nanostructured fluoride thin films exhibiting outstanding fluorescent properties Hierarchic nanosystems for microelektronics
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	25
http://linked.open...iv/tvurceVysledku	Matěj, Zdeněk Kužel, Radomír Nichtová, Lea
http://linked.open...ain/vavai/riv/wos	000278718400009
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies
issn	0885-7156
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	11320

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