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Description
| - Thickness, composition, concentration depth profile and ion irradiation effects on uranium nitride thin films deposited on fused silica have been investigated by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. The films were prepared by reactive DC sputtering at the temperatures of -200 C, +25 C and +300 C. A perfect 1U:1N stoichiometry with a layer thickness of 660 nm was found for the film deposited at -200 C. An increase of the deposition temperature led to an enhancement of surface oxidation and an increase of the thickness of the mixed U-N-Si-O layers at the interface.
- Thickness, composition, concentration depth profile and ion irradiation effects on uranium nitride thin films deposited on fused silica have been investigated by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. The films were prepared by reactive DC sputtering at the temperatures of -200 C, +25 C and +300 C. A perfect 1U:1N stoichiometry with a layer thickness of 660 nm was found for the film deposited at -200 C. An increase of the deposition temperature led to an enhancement of surface oxidation and an increase of the thickness of the mixed U-N-Si-O layers at the interface. (en)
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Title
| - Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy
- Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy (en)
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skos:prefLabel
| - Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy
- Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy (en)
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skos:notation
| - RIV/00216208:11320/10:10057484!RIV11-MSM-11320___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(IAA100100912), Z(MSM0021620834)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216208:11320/10:10057484
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - Spectroscopy; Backscattering; Rutherford; thin films; nitride; uranium; mixing; beam; Ion (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Balogh, A. G.
- Gouder, T.
- Havela, Ladislav
- Kim-Ngan, N. T. H.
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http://linked.open...ain/vavai/riv/wos
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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