About: Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages     Goto   Sponge   NotDistinct   Permalink

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Description
  • The optical mirror is often used as a reference plane in coordinate metrology. Nevertheless, an optical system for straightness and tilting of translation stages can be replaced by a relatively cheap capacitive system. The setup with 1D scans for relative flatness measurement based on capacitive sensors is presented and compared with the absolute deflectometric method. The capacitive method is intended only for conductive targets or conductively coated optics. It can also be used for corrections or feedback in translation stages with nm precision.
  • The optical mirror is often used as a reference plane in coordinate metrology. Nevertheless, an optical system for straightness and tilting of translation stages can be replaced by a relatively cheap capacitive system. The setup with 1D scans for relative flatness measurement based on capacitive sensors is presented and compared with the absolute deflectometric method. The capacitive method is intended only for conductive targets or conductively coated optics. It can also be used for corrections or feedback in translation stages with nm precision. (en)
Title
  • Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages
  • Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages (en)
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  • Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages
  • Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages (en)
skos:notation
  • RIV/00177016:_____/14:#0000840!RIV15-MSM-00177016
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  • P(7AX12104), R
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  • March
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  • 34735
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  • RIV/00177016:_____/14:#0000840
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  • interferometry; capacitive distance measurement; flatness; three-flat test; translation stage; mirror; diffraction grating; deformation; layer (en)
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  • GB - Spojené království Velké Británie a Severního Irska
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  • [B5D84B358E89]
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  • Measurement Science and Technology
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  • 25
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  • Křen, Petr
issn
  • 1361-6501
number of pages
http://bibframe.org/vocab/doi
  • 10.1088/0957-0233/25/4/044017
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