About: Multiaxis interferometric displacement measurement for local probe microscopy     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
rdfs:seeAlso
Description
  • We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
  • We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. (en)
Title
  • Multiaxis interferometric displacement measurement for local probe microscopy
  • Multiaxis interferometric displacement measurement for local probe microscopy (en)
skos:prefLabel
  • Multiaxis interferometric displacement measurement for local probe microscopy
  • Multiaxis interferometric displacement measurement for local probe microscopy (en)
skos:notation
  • RIV/00177016:_____/12:#0000543!RIV13-AV0-00177016
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika
  • 10
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 152306
http://linked.open...ai/riv/idVysledku
  • RIV/00177016:_____/12:#0000543
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • interferometry; microscopy; nanometrology (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [4739C79332D3]
http://linked.open...i/riv/nazevZdroje
  • Central European Journal of Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 2012
http://linked.open...iv/tvurceVysledku
  • Hrabina, Jan
  • Klapetek, Petr
  • Lazar, Josef
  • Číp, Ondřej
  • Šerý, Mojmír
http://linked.open...n/vavai/riv/zamer
issn
  • 1895-1082
number of pages
http://bibframe.org/vocab/doi
  • 10.2478/s11534-011-0093-5
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 32 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software