About: A simple interferometric method for determining the flatness of large optical flats with 1 nm repeatability     Goto   Sponge   NotDistinct   Permalink

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Description
  • This paper describes a new simple and precise method for flatness measurement using a differential interferometer setup with a moving hollow pentaprism. This method is capable of measuring large optical flats/mirrors (more than 500 mm in diameter) with target uncertainty within the nm order. This device is also relatively easy to transport and is cheap. The first measurements of stability and repeatability are presented.
  • This paper describes a new simple and precise method for flatness measurement using a differential interferometer setup with a moving hollow pentaprism. This method is capable of measuring large optical flats/mirrors (more than 500 mm in diameter) with target uncertainty within the nm order. This device is also relatively easy to transport and is cheap. The first measurements of stability and repeatability are presented. (en)
Title
  • A simple interferometric method for determining the flatness of large optical flats with 1 nm repeatability
  • A simple interferometric method for determining the flatness of large optical flats with 1 nm repeatability (en)
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  • A simple interferometric method for determining the flatness of large optical flats with 1 nm repeatability
  • A simple interferometric method for determining the flatness of large optical flats with 1 nm repeatability (en)
skos:notation
  • RIV/00177016:_____/08:#0000118!RIV11-MPO-00177016
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • R
http://linked.open...iv/cisloPeriodika
  • 10
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 354503
http://linked.open...ai/riv/idVysledku
  • RIV/00177016:_____/08:#0000118
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • flatness; metrology; deflectometry; interferometry (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [18717967747F]
http://linked.open...i/riv/nazevZdroje
  • Measurement Science and Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 19
http://linked.open...iv/tvurceVysledku
  • Křen, Petr
issn
  • 1361-6501
number of pages
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