About: Complete Characterization of Rough Polymorphous Silicon Films by Atomic Force Microscopy and the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry

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About: Complete Characterization of Rough Polymorphous Silicon Films by Atomic Force Microscopy and the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper the results of the complete characterization of hydrogenated polymorphous silicon (pm-Si:H) films deposited onto silicon single crystal substrates performed by atomic force microscopy (AFM) and the combined method of spectroscopic ellipsometry and spectroscopic reflectometry are presented. This combined method is applied in the multi-sample modification. The experimental data are measured within the near-UV, visible and near-IR regions (190-1000 nm). For treating the experimental data the dispersion model recently formulated for amorphous chalcogenide films is employed. This model is based on the parameterization of the density of electronic states. Moreover, for the treatment of the experimental data the structural model containing the defects, i.e. roughness of the upper boundaries of the films, overlayers, transition layers and refractive index profile inhomogeneity, is employed. The results of the characterization consist of the determination of the spectral dependences of the optica In this paper the results of the complete characterization of hydrogenated polymorphous silicon (pm-Si:H) films deposited onto silicon single crystal substrates performed by atomic force microscopy (AFM) and the combined method of spectroscopic ellipsometry and spectroscopic reflectometry are presented. This combined method is applied in the multi-sample modification. The experimental data are measured within the near-UV, visible and near-IR regions (190-1000 nm). For treating the experimental data the dispersion model recently formulated for amorphous chalcogenide films is employed. This model is based on the parameterization of the density of electronic states. Moreover, for the treatment of the experimental data the structural model containing the defects, i.e. roughness of the upper boundaries of the films, overlayers, transition layers and refractive index profile inhomogeneity, is employed. The results of the characterization consist of the determination of the spectral dependences of the optica (en)
Title	Complete Characterization of Rough Polymorphous Silicon Films by Atomic Force Microscopy and the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry Complete Characterization of Rough Polymorphous Silicon Films by Atomic Force Microscopy and the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry (en)
skos:prefLabel	Complete Characterization of Rough Polymorphous Silicon Films by Atomic Force Microscopy and the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry Complete Characterization of Rough Polymorphous Silicon Films by Atomic Force Microscopy and the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry (en)
skos:notation	RIV/00177016:_____/04:#0000334!RIV11-GA0-00177016
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA101/01/1104), P(GA202/98/0988), Z(MSM 143100003)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Klapetek, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Český metrologický institut
http://linked.open...dnocenehoVysledku	558384
http://linked.open...ai/riv/idVysledku	RIV/00177016:_____/04:#0000334
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Ellipsometry (en)
http://linked.open.../riv/klicoveSlovo	Ellipsometry
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[A72CDABA3084]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry
http://linked.open...UplatneniVysledku	2004
http://linked.open...v/svazekPeriodika	455-456
http://linked.open...iv/tvurceVysledku	Franta, Daniel Klapetek, Petr Ohlídal, Ivan Roca i Cabarrocas, Pere
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
issn	0040-6090
number of pages	5 (xsd:int)

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