About: Theoretical analysis of the atomic force microscopy characterization of columnar thin ﬁlms

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper, the theoretical analysis of the inﬂuence of ﬁnite linear dimensions of an atomic force microscope tip on proﬁles of the upper boundaries of columnar thin ﬁlms and their statistical quantities is performed. This analysis is based on a numerical evaluation of the main statistical quantities, i.e. the standard deviations of the heights and slopes, one-dimensional distributions of the probability density of heights and slopes and power spectral density function, corresponding to a simulated columnar structure of the thin ﬁlms. It is shown that the strongest misrepresentation of the measured proﬁles of the upper boundaries of the columnar ﬁlms originates in the cases when the linear dimensions of the columns are smaller or comparable with the linear dimensions of the tip. Further, it is shown that using a surface reconstruction procedure one can correct (improve) the boundary proﬁles and their statistical quantities partially. In this paper, the theoretical analysis of the inﬂuence of ﬁnite linear dimensions of an atomic force microscope tip on proﬁles of the upper boundaries of columnar thin ﬁlms and their statistical quantities is performed. This analysis is based on a numerical evaluation of the main statistical quantities, i.e. the standard deviations of the heights and slopes, one-dimensional distributions of the probability density of heights and slopes and power spectral density function, corresponding to a simulated columnar structure of the thin ﬁlms. It is shown that the strongest misrepresentation of the measured proﬁles of the upper boundaries of the columnar ﬁlms originates in the cases when the linear dimensions of the columns are smaller or comparable with the linear dimensions of the tip. Further, it is shown that using a surface reconstruction procedure one can correct (improve) the boundary proﬁles and their statistical quantities partially. (en)
Title	Theoretical analysis of the atomic force microscopy characterization of columnar thin ﬁlms Theoretical analysis of the atomic force microscopy characterization of columnar thin ﬁlms (en)
skos:prefLabel	Theoretical analysis of the atomic force microscopy characterization of columnar thin ﬁlms Theoretical analysis of the atomic force microscopy characterization of columnar thin ﬁlms (en)
skos:notation	RIV/00177016:_____/03:#0000326!RIV11-GA0-00177016
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA101/01/1104), P(GA202/01/1110)
http://linked.open...iv/cisloPeriodika	11
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Klapetek, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Český metrologický institut
http://linked.open...dnocenehoVysledku	630810
http://linked.open...ai/riv/idVysledku	RIV/00177016:_____/03:#0000326
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	AFM (en)
http://linked.open.../riv/klicoveSlovo	AFM
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[73781CE1E6EC]
http://linked.open...i/riv/nazevZdroje	Ultramicroscopy
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	94
http://linked.open...iv/tvurceVysledku	Klapetek, Petr Ohlídal, I.
issn	0304-3991
number of pages	10 (xsd:int)

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