About: Estimation of mechanical properties of thin Al surface layer

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Estimation of mechanical properties of thin Al surface layer Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 μm and their height was about 2 μm. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties. The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 μm and their height was about 2 μm. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties. (en)
Title	Estimation of mechanical properties of thin Al surface layer Estimation of mechanical properties of thin Al surface layer (en)
skos:prefLabel	Estimation of mechanical properties of thin Al surface layer Estimation of mechanical properties of thin Al surface layer (en)
skos:notation	RIV/68081723:_____/12:00387893!RIV13-AV0-68081723
http://linked.open...avai/riv/aktivita	I S Z
http://linked.open...avai/riv/aktivity	I, S, Z(AV0Z20410507)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kruml, Tomáš Náhlík, Luboš Kuběna, Ivo Petráčková, Klára Truhlář, Michal
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky materiálů AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	134787
http://linked.open...ai/riv/idVysledku	RIV/68081723:_____/12:00387893
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	microcompression; thin film properties; focused ion beam; FEM modelling (en)
http://linked.open.../riv/klicoveSlovo	focused ion beam microcompression thin film properties FEM modelling
http://linked.open...ontrolniKodProRIV	[49B6FD90C7B2]
http://linked.open...v/mistoKonaniAkce	Plzeň
http://linked.open...i/riv/mistoVydani	Plzeň
http://linked.open...i/riv/nazevZdroje	14th International conference Applied Mechanics 2012 - Conference proceedings
http://linked.open...in/vavai/riv/obor	JL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Kruml, Tomáš Náhlík, Luboš Kuběna, Ivo Petráčková, Klára Truhlář, Michal
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2012-04-16 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physical properties of advanced materials in relation to their microstructure and processing
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Západočeská univerzita v Plzni
https://schema.org/isbn	978-80-261-0097-3

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 112 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software