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Description
  • The total internal reflection ellipsometry on the base of coupling prism is described. The problem is solved by Fourier modal method applied using T-matrix algorithm to find diffraction response from multilayer system. Resulting values of ellipsometric parameters ∆ and ψ are studied at the incidence angle interval from 0 to 90 deg for dielectric and metallic lamellar systems. The material influences of the thin air gap thickness are discussed, too.
  • The total internal reflection ellipsometry on the base of coupling prism is described. The problem is solved by Fourier modal method applied using T-matrix algorithm to find diffraction response from multilayer system. Resulting values of ellipsometric parameters ∆ and ψ are studied at the incidence angle interval from 0 to 90 deg for dielectric and metallic lamellar systems. The material influences of the thin air gap thickness are discussed, too. (en)
  • Je popisována elipsometrie při úplném vnitřním odrazu na principu vazebního hranolu. Úloha je řešena Fourierovou modální metodou aplikací T-maticového algoritmu při určení difrakční odezvy od multivrstvy. Výsledné hodnoty elipsometrických úhlů jsou studovány pro úhly dopadu od 0 do 90 stupňů pro dielektrické i metalické lamelární systémy. Rovněž je studován vliv materiálových vlastností a tloušťky gapu. (cs)
Title
  • Total internal reflection ellipsometry of lamellar gratings
  • Elipsometrie při úplném odrazu na lamelární mřížce (cs)
  • Total internal reflection ellipsometry of lamellar gratings (en)
skos:prefLabel
  • Total internal reflection ellipsometry of lamellar gratings
  • Elipsometrie při úplném odrazu na lamelární mřížce (cs)
  • Total internal reflection ellipsometry of lamellar gratings (en)
skos:notation
  • RIV/61989100:27600/06:00013524!RIV07-GA0-27600___
http://linked.open.../vavai/riv/strany
  • 910-913
http://linked.open...avai/riv/aktivita
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  • P(1P05ME768), P(GA202/03/0776), S
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  • 2
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  • 504021
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  • RIV/61989100:27600/06:00013524
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  • ellipsometry; total reflection; lamellar gratings (en)
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http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
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  • [B5C1D58A7D5B]
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  • International Journal of Microwave and Optical Technology
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  • 1
http://linked.open...iv/tvurceVysledku
  • Antoš, Roman
  • Pištora, Jaromír
  • Postava, Kamil
  • Vlček, Jaroslav
  • Višňovský, Štefan
  • Watanabe, Koki
  • Yamaguchi, Tomuo
issn
  • 1553-0396
number of pages
http://localhost/t...ganizacniJednotka
  • 27600
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