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rdf:type
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Description
| - A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PEM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection.
- A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PEM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection. (en)
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Title
| - Precise phase-modulation generalized ellipsometry of anisotropic samples
- Precise phase-modulation generalized ellipsometry of anisotropic samples (en)
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skos:prefLabel
| - Precise phase-modulation generalized ellipsometry of anisotropic samples
- Precise phase-modulation generalized ellipsometry of anisotropic samples (en)
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skos:notation
| - RIV/61989100:27350/08:00019795!RIV10-MSM-27350___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GA202/06/0531), P(KAN400100653), Z(MSM6198910016)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/61989100:27350/08:00019795
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - generalized ellipsometry; anisotropic samples (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - US - Spojené státy americké
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Pištora, Jaromír
- Postava, Kamil
- Halagačka, L.
- Foldyna, M.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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