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  • The paper describes two methods which can be used to control the film structure: (1) the energy delivered to the growing film, i.e. (i) substrate heating and (ii) ion bombardment; and (2) the interlayer inserted between the substrate and the film. These methods were tested on Cu and Zr-Y-N films and Cu and Cr-Ni-N films used as interlayers. It was found that both methods can improve the crystallinity of sputter deposited films. Dependences of the film structure on substrate temperature, negative substrate bias and substrate ion current density are given. The effect of the interlayer on the structure of the deposited film is also clearly demonstrated.
  • The paper describes two methods which can be used to control the film structure: (1) the energy delivered to the growing film, i.e. (i) substrate heating and (ii) ion bombardment; and (2) the interlayer inserted between the substrate and the film. These methods were tested on Cu and Zr-Y-N films and Cu and Cr-Ni-N films used as interlayers. It was found that both methods can improve the crystallinity of sputter deposited films. Dependences of the film structure on substrate temperature, negative substrate bias and substrate ion current density are given. The effect of the interlayer on the structure of the deposited film is also clearly demonstrated. (en)
Title
  • Control of structure in magnetron sputtered thin film
  • Control of structure in magnetron sputtered thin film (en)
skos:prefLabel
  • Control of structure in magnetron sputtered thin film
  • Control of structure in magnetron sputtered thin film (en)
skos:notation
  • RIV/49777513:23520/01:00064893!RIV/2002/GA0/235202/N
http://linked.open.../vavai/riv/strany
  • s. 201-205
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GV106/96/K245), P(ME 173), P(ME 203), Z(MSM 235200002)
http://linked.open...iv/cisloPeriodika
  • leden
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 676411
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/01:00064893
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Structure; Energy delivered to the growing film; Interlayer; Magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [2ED82B438F90]
http://linked.open...i/riv/nazevZdroje
  • Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • Vol. 142
http://linked.open...iv/tvurceVysledku
  • Musil, Jindřich
  • Čerstvý, Radomír
  • Poláková, Helena
  • Kubásek, Milan
http://linked.open...n/vavai/riv/zamer
issn
  • 0257-8972
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
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