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  • The objective of our study was to investigate the mechanical properties of amorphous and nanocrystalline silicon thin layer deposited on flexible sustrates by means of depth sensing intendation method.
  • The objective of our study was to investigate the mechanical properties of amorphous and nanocrystalline silicon thin layer deposited on flexible sustrates by means of depth sensing intendation method. (en)
Title
  • Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates
  • Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates (en)
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  • Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates
  • Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates (en)
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  • RIV/00216224:14410/05:00014838!RIV10-MSM-14410___
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  • 529320
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  • RIV/00216224:14410/05:00014838
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  • Mechanical properties; Amorphous silicon; Nanocrystalline Silicon (en)
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  • [7C1C8D87F08A]
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  • Brno
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  • NENAMAT International Conference Proceedings NANO05
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  • Buršíková, Vilma
  • Sládek, Petr
  • Sťahel, Pavel
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  • Vysoké učení technické v Brně. Fakulta strojního inženýrství
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  • 80-214-3085-0
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  • 14410
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