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Description
  • Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time.
  • Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time. (en)
Title
  • Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry
  • Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry (en)
skos:prefLabel
  • Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry
  • Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry (en)
skos:notation
  • RIV/00216224:14310/11:00051581!RIV12-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • S, Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika
  • 9
http://linked.open...vai/riv/dodaniDat
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  • 218784
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  • RIV/00216224:14310/11:00051581
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  • ellipsometry: spectroscopic; analyzer: rotating (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [A6D3DF0BB392]
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  • Thin Solid Films
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http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 519
http://linked.open...iv/tvurceVysledku
  • Münz, Filip
  • Maršík, Přemysl
  • Humlíček, Josef
http://linked.open...ain/vavai/riv/wos
  • 000289174200029
http://linked.open...n/vavai/riv/zamer
issn
  • 0040-6090
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.tsf.2010.12.063
http://localhost/t...ganizacniJednotka
  • 14310
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