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  • In present paper we studied the optical constants of the diamond-like carbon (DLC) films and their changes with annealing. The multisample modification of combined variable angle spectroscopic ellipsometry and near normal spectroscopic reflectometry was used. The optical constants of the DLC films were simulated by our recently published six-parameter dispersion model employing a parameterization of the density of electronic states (DOS). Based on the dispersion model parameters the density of and electrons were evaluated. We showed that from our model and the independently determined hydrogen atomic fraction of the films before and after annealing the ratio between momentum matrix elements of pi->pi* and sigma->sigma* transitions and the correct sp3-to-sp2 carbon bonding configuration ratio can be calculated.
  • In present paper we studied the optical constants of the diamond-like carbon (DLC) films and their changes with annealing. The multisample modification of combined variable angle spectroscopic ellipsometry and near normal spectroscopic reflectometry was used. The optical constants of the DLC films were simulated by our recently published six-parameter dispersion model employing a parameterization of the density of electronic states (DOS). Based on the dispersion model parameters the density of and electrons were evaluated. We showed that from our model and the independently determined hydrogen atomic fraction of the films before and after annealing the ratio between momentum matrix elements of pi->pi* and sigma->sigma* transitions and the correct sp3-to-sp2 carbon bonding configuration ratio can be calculated. (en)
Title
  • Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films
  • Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films (en)
skos:prefLabel
  • Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films
  • Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films (en)
skos:notation
  • RIV/00216224:14310/05:00014247!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 143100003)
http://linked.open...iv/cisloPeriodika
  • 11-12
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 546692
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00014247
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • DLC; Thermal stability; optical properties; sp3/sp2 ratio (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [95034765E847]
http://linked.open...i/riv/nazevZdroje
  • Diamond and Related Materials
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 14
http://linked.open...iv/tvurceVysledku
  • Buršíková, Vilma
  • Franta, Daniel
  • Ohlídal, Ivan
  • Zajíčková, Lenka
  • Sťahel, Pavel
http://linked.open...n/vavai/riv/zamer
issn
  • 0925-9635
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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