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rdf:type
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Description
| - To improve the quality of thin film deposition by magnetron discharges, particularly by an effective ionisation of the sputtered vapour, we developed a new ionised physical vapour deposition (IPVD) method based on preionised Pulsed magnetron discharges. By superposition of continuous, microwave or RF discharge, with a fast pulsed abnormal discharge, target current density is extended to very high values during short pulses. Efficient vapour ionisation is obtained and due to the current pulse shortness, electric arc development is avoided.
- To improve the quality of thin film deposition by magnetron discharges, particularly by an effective ionisation of the sputtered vapour, we developed a new ionised physical vapour deposition (IPVD) method based on preionised Pulsed magnetron discharges. By superposition of continuous, microwave or RF discharge, with a fast pulsed abnormal discharge, target current density is extended to very high values during short pulses. Efficient vapour ionisation is obtained and due to the current pulse shortness, electric arc development is avoided. (en)
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Title
| - Preionised pulsed magnetron discharges for ionised physical vapour deposition
- Preionised pulsed magnetron discharges for ionised physical vapour deposition (en)
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skos:prefLabel
| - Preionised pulsed magnetron discharges for ionised physical vapour deposition
- Preionised pulsed magnetron discharges for ionised physical vapour deposition (en)
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skos:notation
| - RIV/00216224:14310/05:00012906!RIV10-MSM-14310___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GD202/03/H162), Z(MSM0021622411)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216224:14310/05:00012906
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - pulsed magnetron; preionization; transport processes (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Journal of Optoelectronics and Advanced Materials
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Vašina, Petr
- Meško, Marcel
- Bretagne, Jean
- Touzeau, Michel
- de Poucques, Ludovic
- Imbert, Jean-Christophe
- Dauchot, Jean-Pierre
- Ganciu, Mihai
- Hecq, Michel
- Konstantinidis, Stephanos
- Paint, Yoann
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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