About: Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges

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About: Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Ultrananocrystalline diamodn (UNCD) films were deposited directly on polished silicon substrates in microwave discharge (2.45 GHz) combined with rf caparitive plasma (13.56 MHz) ingnited at the substrate electrode. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analyses of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing diamond like carbon and SiC materials. Ultrananocrystalline diamodn (UNCD) films were deposited directly on polished silicon substrates in microwave discharge (2.45 GHz) combined with rf caparitive plasma (13.56 MHz) ingnited at the substrate electrode. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analyses of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing diamond like carbon and SiC materials. (en)
Title	Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges (en)
skos:prefLabel	Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges (en)
skos:notation	RIV/49777513:23210/10:00503819!RIV11-GA0-23210___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA106/09/0125), P(GA202/07/1669), P(KAN311610701), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	12-13
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Bláhová, Olga
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta strojní
http://linked.open...dnocenehoVysledku	277141
http://linked.open...ai/riv/idVysledku	RIV/49777513:23210/10:00503819
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Ultrananocrystalline diamond; microwave discharge; hardness; fracture toughness (en)
http://linked.open.../riv/klicoveSlovo	microwave discharge hardness fracture toughness Ultrananocrystalline diamond
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[186CCD9B4E13]
http://linked.open...i/riv/nazevZdroje	Surface & Coatings Technology
http://linked.open...in/vavai/riv/obor	JJ
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation and characterization of metal/polymer structures Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges Nanometrology using methods of scanning probe microscopy
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	204
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Franta, Daniel Nečas, David Zajíčková, Lenka Šperka, Jiří Bláhová, Olga Karásková, Monika
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0257-8972
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	23210

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