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rdf:type
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Description
| - Plasma properties related to TiN deposition are compared in two triode ion-plating systems using a low-voltage arc discharge.
- Plasma properties related to TiN deposition are compared in two triode ion-plating systems using a low-voltage arc discharge. (en)
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Title
| - Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties.
- Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties. (en)
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skos:prefLabel
| - Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties.
- Plasma diagnosticof triode ion plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties. (en)
|
skos:notation
| - RIV/68378271:_____/99:02000092!RIV/2003/AV0/A02003/N
|
http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GV106/96/K245), P(KSK1043601), Z(AV0Z1010914)
|
http://linked.open...iv/cisloPeriodika
| |
http://linked.open...vai/riv/dodaniDat
| |
http://linked.open...aciTvurceVysledku
| |
http://linked.open.../riv/druhVysledku
| |
http://linked.open...iv/duvernostUdaju
| |
http://linked.open...titaPredkladatele
| |
http://linked.open...dnocenehoVysledku
| |
http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/99:02000092
|
http://linked.open...riv/jazykVysledku
| |
http://linked.open.../riv/klicovaSlova
| |
http://linked.open.../riv/klicoveSlovo
| |
http://linked.open...odStatuVydavatele
| - CH - Švýcarská konfederace
|
http://linked.open...ontrolniKodProRIV
| |
http://linked.open...i/riv/nazevZdroje
| - Surface and Coatings Technology
|
http://linked.open...in/vavai/riv/obor
| |
http://linked.open...ichTvurcuVysledku
| |
http://linked.open...cetTvurcuVysledku
| |
http://linked.open...ocetUcastnikuAkce
| |
http://linked.open...nichUcastnikuAkce
| |
http://linked.open...vavai/riv/projekt
| |
http://linked.open...UplatneniVysledku
| |
http://linked.open...v/svazekPeriodika
| |
http://linked.open...iv/tvurceVysledku
| - Kadlec, Stanislav
- Panjan, P.
- Quaeyhaegens, C.
- Wouters, S.
- Stals, L. M.
- Maček, M.
- Navinšek, B.
- Meert, B.
|
http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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