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  • 1. Removing technical barriers to reach physical limits – UniSEM chamber design 2. Dual electron and ion beam instrument improvements: advanced SEM immersion optics and plasma FIB 3. Development of improved TOF-SIMS sensitivity and lateral resolution 4. Improved secondary ion yields by controlling surface chemistry 5. Integration of probe methods in to the charged particles analytical system 6. Integration of optical methods in to the charged particles analytical system 7. Full integration of all techniques to the unique UniSEM prototype, software development and demonstration of novel capabilities 8. 3D analysis in a tomography approach using combined analytical techniques (en)
  • 1. Removing technical barriers to reach physical limits – UniSEM chamber design 2. Dual electron and ion beam instrument improvements: advanced SEM immersion optics and plasma FIB 3. Development of improved TOF-SIMS sensitivity and lateral resolution 4. Improved secondary ion yields by controlling surface chemistry 5. Integration of probe methods in to the charged particles analytical system 6. Integration of optical methods in to the charged particles analytical system 7. Full integration of all techniques to the unique UniSEM prototype, software development and demonstration of novel capabilities 8. 3D analysis in a tomography approach using combined analytical techniques
Title
  • Universal SEM as a multi-nano-analytic tool - UnivSEM (en)
  • Universal SEM as a multi-nano-analytic tool - UnivSEM
skos:notation
  • 7E12087
http://linked.open...avai/cep/aktivita
http://linked.open...kovaStatniPodpora
http://linked.open...ep/celkoveNaklady
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http://linked.open...ai/cep/hlavniObor
http://linked.open...vai/cep/kategorie
http://linked.open.../cep/klicovaSlova
  • scanning electron microscopy; focused ion beam; elemental and molecular analysis in nanometres; scanning probes; SPM; confocal Raman microscopy; chemical imaging; 3D tomography; TOF-SIMS (en)
http://linked.open...ep/partnetrHlavni
http://linked.open...inujicichPrijemcu
http://linked.open...cep/pocetPrijemcu
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http://linked.open...ep/zahajeniReseni
http://linked.open...tniCyklusProjektu
http://linked.open...n/vavai/cep/vyzva
http://linked.open.../cep/klicoveSlovo
  • scanning electron microscopy
  • 3D tomography
  • SPM
  • chemical imaging
  • confocal Raman microscopy
  • elemental and molecular analysis in nanometres
  • focused ion beam
  • scanning probes
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