Ultra-high vacuum 10-6-10-10 Pa is used presently routinely in industry. It is necessary to measure it reliably. Primary calibration facilities for ultra-high vacuum are developed in some countries. The background there must be at least 100 times lower than the calibrated pressure. Gauges enabling pressure measurement up to 10-12 Pa and stable gauges as transfer standards up to 10-10 Pa must be available. Many processes (gassing, x-ray current, ESD current, changes in sensitivity, pumping) cause severe errors at measurement of these low pressures. Single gauge principles suppress (often on empirical basis only) single processes. The project proposes combined experimental and theoretical study of the processes in gauges of selected principles aimed at better understanding to gain knowledge necessary for design of the gauges for pressure monitoring in extremely high vacuum and for ultra-high vacuum transfer standards development. Unique metrological facility finalized in 2010 will be used for project solution. It yields new experimental potentialities unattainable ever before. (en)
Cílem projektu je studium procesů v ionizačních měrkách, které limitují jejich využití pro měření extrémně vysokého vakua a jako přenosových normálů ultravysokého vakua s cílem získat teoretické a experimentální poznatky nezbytné pro vývoj měrek pro uvedené účely.