About: Reliable vapor pressure measurements for electronics and optical coatings

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Projekt, within Data Space : linked.opendata.cz associated with source document(s)

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Description	In the proposed project, the two institutes plan to combine (1) ICT expertise in vapor pressure measurements and thermodynamics, (2) NIST expertise in accurate measurements of small pressures, (3) ICT expertise in correlating vapor pressure measurements with related thermal data, and (4) measurements made by both ICT and NIST on selected compounds. The expected results are: 1. Reliable vapor pressure data for metal-organic precursors. 2. Accurate vapor pressure data for benign compounds for calibrating pressure transducers below 1000 Pa. 3. Methods to improve the efficiency and range of vapor pressure measurements The cooperation between the Institute of Chemical Technology Prague (ICT) and the National Institute of Standards and Technology (NIST) will enhance the accuracy of these measurements. (en) Hlavní cíle jsou 1) získání spolehlivých dat pro organokovové prekurzory používané pro přípravu materiálů pro elektroniku a optiku 2) vytvoření souborů doporučených dat pro kalibrační látky 3) zvýšení efektivity měření a rozsahu měřitelných tlaků. (cs)
Title	Přesná měření tlaku nasycených par materiálů pro elektroniku a optické povlaky (cs) Reliable vapor pressure measurements for electronics and optical coatings (en)
http://linked.open...vai/cislo-smlouvy	http://linked.opendata.cz/resource/domain/vavai/cep/smlouva/2062/2011-320
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http://linked.open...n/vavai/kategorie	http://linked.opendata.cz/resource/domain/vavai/cep/kategorie/1
http://linked.open...vai/klicova-slova	vapor pressure; static method; metal-organic compounds; precursors; epitaxy; chemical deposition; reference compounds; simultaneous correlation; heat capacity; ideal gas; ab initio; spinning rotor gauge; acoustic resonator; semipermeable membrane (en)
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is http://linked.open...ain/vavai/projekt of	http://linked.opendata.cz/resource/domain/vavai/cep/ucast/2010/ME10049/orjk-22340 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/2011/ME10049/orjk-22340 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/2012/ME10049/orjk-22340 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/2013/ME10049/orjk-22340

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