About: High- tech energy beams technologies for deposition and treatment of films for electronics production.

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About: High- tech energy beams technologies for deposition and treatment of films for electronics production. Goto Sponge NotDistinct Permalink

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Description	Advanced technologies for microelectronics and sensorics based on the combination of the high-tech energy beams technologies (laser beams, ion beams, UV light and microwavw exposures) and those of micro- and nano-films deposited by vacuum, plasma and wet processes as well. The selectivity of processes accompanied by a high resolution of lines and gaps of the film structures is of primary importance in the development. (en) Pokročilé technologie pro mikroelektroniku a senzoriku založené na kombinaci technologií energetických svazků (laser, UV záření, iontové svazky, mikrovlnné záření apod.) a technologií mikro- a nano-vrstev nanášených vakuovými technikami, plasmatickými technikami i mokrými procesy. Důraz je kladen na selektivitu procesů s výrazně vysokým rozlišením šířky drah a mezer vytvářených struktur. (cs)
Title	Pokročilé svazkové technologie vytváření a zpracování vrstev pro výrobní praxi v elektronice. (cs) High- tech energy beams technologies for deposition and treatment of films for electronics production. (en)
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http://linked.open...vai/klicova-slova	microelectronics; sensorics; laser beam; ion beam; UV light; microwaves; misro-films; nano-films; plasma; vacuum deposition; wet deposition (en)
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