About: Contrast and detection in scanning electron microscopy     Goto   Sponge   NotDistinct   Permalink

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  • The project aims to increase our knowledge of the complex physical interaction mechanisms between electrons in various semiconductor materials. This should lead to: - an understanding of contrast mechanisms in Scanning Electron Microscopy - the evaluation of new contrast mechanisms, - methods, techniques and electron detection devices able to generate and exploit contrast in SEM-nanographs to the full, both qualitatively and quantitatively. The final result of the project is that the capabilities of this technique, which is already applied in the study of semiconductor devices, can be significantly enhanced, fulfilling a strong existing need in the semiconductor industry. (en)
  • Vyvinout počítačové modely interakce elektronů s materiálem a souhrnného procesu detekce rastrovaného obrazu, vytvořit nové techniky vytváření kontrastu a nové typy detektorů a použít je při zobrazování nových polovodičových materiálů a nanostruktur. (cs)
Title
  • Contrast and detection in scanning electron microscopy (en)
  • Kontrast a detekce v rastrovací elektronové mikroskopii (Contrast and detection in scanning electron microscopy) (cs)
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  • scanning electron microscopy; image contrast; detection of electrons; semiconductors; nanotechnology (en)
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