About: Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering

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About: Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Amorphous silicon carbonitride (a-SiCxNy) thin films deposited on the SiO2 substrates by reactive magnetron sputtering was studied by Raman and electron paramagnetic resonance (EPR) spectroscopy. Raman analysis indicates the presence of C–N, Si–N, C–C bonds in a-SiCxNy films. Three EPR signals were revealed in a-SiCxNy/SiO2. One of them with g=2.0033 was attributed to the carbon-dangling bonds (CDB). Based on the lineshape and linewidth, the EPR signal was attributed to the unpaired electron delocalized over sp2 carbon cluster. With the increase of nitrogen (N) content, the spin density of CDB significantly increases. From the temperature dependence of the linewidth and integral intensity of the CDB EPR signal, it was concluded that the antiferromagnetic ordering occurs in spin system. The antiferromagnetic exchange constant between CDBs was found. Amorphous silicon carbonitride (a-SiCxNy) thin films deposited on the SiO2 substrates by reactive magnetron sputtering was studied by Raman and electron paramagnetic resonance (EPR) spectroscopy. Raman analysis indicates the presence of C–N, Si–N, C–C bonds in a-SiCxNy films. Three EPR signals were revealed in a-SiCxNy/SiO2. One of them with g=2.0033 was attributed to the carbon-dangling bonds (CDB). Based on the lineshape and linewidth, the EPR signal was attributed to the unpaired electron delocalized over sp2 carbon cluster. With the increase of nitrogen (N) content, the spin density of CDB significantly increases. From the temperature dependence of the linewidth and integral intensity of the CDB EPR signal, it was concluded that the antiferromagnetic ordering occurs in spin system. The antiferromagnetic exchange constant between CDBs was found. (en)
Title	Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering (en)
skos:prefLabel	Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering (en)
skos:notation	RIV/68378271:_____/14:00431530!RIV15-GA0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(GP13-06697P), P(LM2011029)
http://linked.open...iv/cisloPeriodika	6
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Vorlíček, Vladimír Lančok, Ján Savchenko, Dariia
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	34719
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/14:00431530
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	dangling bonds; electron paramagnetic resonance; Raman spectroscopy; silicon carbonitride; thin films (en)
http://linked.open.../riv/klicoveSlovo	dangling bonds Raman spectroscopy electron paramagnetic resonance thin films silicon carbonitride
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[7F53122791C3]
http://linked.open...i/riv/nazevZdroje	Physica Status Solidi B-Basic Solid State Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	SAFMAT - Centre of Functional Materials Analyses Investigation of SiC nanostructures by optical and magnetic resonance methods: perspective for integral optoelectronics and spintronics
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	251
http://linked.open...iv/tvurceVysledku	Lančok, Ján Vorlíček, Vladimír Savchenko, Dariia Kulikovsky, V. Kalabukhova, E. Kiselov, V.
http://linked.open...ain/vavai/riv/wos	000337608600007
issn	0370-1972
number of pages	8 (xsd:int)
http://bibframe.org/vocab/doi	10.1002/pssb.201451041

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