About: Very low energy scanning electron microscopy

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	An overview of recent developments in very low energy scanning electron microscopy is presented. Electron optical aspects are briefly summarized including the low energy beam formation in a cathode lens equipped column, comparison of the sequential and overlapped electric and magnetic fields in the objective lens, and detection issues including extension to the transmitted electron mode as well as to the multichannel detection of signal sorted according to the polar angle of emission. In addition to the acquisition of contrasts specific for the very low energy range, advantages of detection of electrons backscattered to large angles from the surface normal are demonstrated on selected application examples. An overview of recent developments in very low energy scanning electron microscopy is presented. Electron optical aspects are briefly summarized including the low energy beam formation in a cathode lens equipped column, comparison of the sequential and overlapped electric and magnetic fields in the objective lens, and detection issues including extension to the transmitted electron mode as well as to the multichannel detection of signal sorted according to the polar angle of emission. In addition to the acquisition of contrasts specific for the very low energy range, advantages of detection of electrons backscattered to large angles from the surface normal are demonstrated on selected application examples. (en)
Title	Very low energy scanning electron microscopy Very low energy scanning electron microscopy (en)
skos:prefLabel	Very low energy scanning electron microscopy Very low energy scanning electron microscopy (en)
skos:notation	RIV/68081731:_____/11:00358595!RIV12-MSM-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(OE08012), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Hovorka, Miloš Müllerová, Ilona Konvalina, Ivo Mikmeková, Šárka Frank, Luděk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	238278
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/11:00358595
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	scanning electron microscopy; low energy electrons; cathode lens; very low energy STEM; grain contrast (en)
http://linked.open.../riv/klicoveSlovo	cathode lens grain contrast low energy electrons very low energy STEM scanning electron microscopy
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[C6BE0E8E5710]
http://linked.open...i/riv/nazevZdroje	Nuclear Instruments & Methods in Physics Research Section A
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Contrast and detection in scanning electron microscopy
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	645
http://linked.open...iv/tvurceVysledku	Konvalina, Ivo Mikmeková, Šárka Hovorka, Miloš Müllerová, Ilona Frank, Luděk
http://linked.open...ain/vavai/riv/wos	000292713900011
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	0168-9002
number of pages	9 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.nima.2010.12.214
is http://linked.open...avai/riv/vysledek of	Very low energy scanning electron microscopy

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