About: Novel concepts for low-pressure, low-temperature nanodiamond growth using MW linear antenna plasma sources     Goto   Sponge   NotDistinct   Permalink

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  • Industrial applications of PE MWCVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high- density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 10 El 1 cm-3), accompanied by data from OES for CH4 - CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown.
  • Industrial applications of PE MWCVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high- density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 10 El 1 cm-3), accompanied by data from OES for CH4 - CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown. (en)
Title
  • Novel concepts for low-pressure, low-temperature nanodiamond growth using MW linear antenna plasma sources
  • Novel concepts for low-pressure, low-temperature nanodiamond growth using MW linear antenna plasma sources (en)
skos:prefLabel
  • Novel concepts for low-pressure, low-temperature nanodiamond growth using MW linear antenna plasma sources
  • Novel concepts for low-pressure, low-temperature nanodiamond growth using MW linear antenna plasma sources (en)
skos:notation
  • RIV/60461373:22340/10:00023577!RIV11-MSM-22340___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
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  • 1
http://linked.open...vai/riv/dodaniDat
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  • 275427
http://linked.open...ai/riv/idVysledku
  • RIV/60461373:22340/10:00023577
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Antennas; Diamonds; Electric discharges; Industrial applications; Plasma density; Plasmas; Three dimensional (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [819995D4E34F]
http://linked.open...i/riv/nazevZdroje
  • Mater.Res.SocietySymp.Proceedings
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 1203
http://linked.open...iv/tvurceVysledku
  • Vlček, Jan
issn
  • 0272-9172
number of pages
http://localhost/t...ganizacniJednotka
  • 22340
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