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  • This paper deals with the possibilities of backscattered electrons detection by scintillation detector in low voltage scanning electron microscope (LV SEM). Low energy of signal electrons, especially backscattered electrons, is the reason of lower detectors yield. While the problem of secondary electrons detection was successfully solved by their extraction using a magnetic field and detection in objective lens, efficient detection of backscattered electrons remains unsolved. The initial energy of backsscattered electrons of 0.7-3 kV is the energy, on which the light yield of scintillators decreases. Backscattered electrons with this energy will be accelerated to scintillator by electrostatic field and secondary electrons with maximal energy of 50 eV will be filtered by an energy filter or by a magnetic field.
  • This paper deals with the possibilities of backscattered electrons detection by scintillation detector in low voltage scanning electron microscope (LV SEM). Low energy of signal electrons, especially backscattered electrons, is the reason of lower detectors yield. While the problem of secondary electrons detection was successfully solved by their extraction using a magnetic field and detection in objective lens, efficient detection of backscattered electrons remains unsolved. The initial energy of backsscattered electrons of 0.7-3 kV is the energy, on which the light yield of scintillators decreases. Backscattered electrons with this energy will be accelerated to scintillator by electrostatic field and secondary electrons with maximal energy of 50 eV will be filtered by an energy filter or by a magnetic field. (en)
  • Práce se zabývá možnostmi detekce zpětně odražených elektronů (BSE) scintilačním detektorem v nízkonapěťové rastrovací elektronové mikroskopii (LV SEM). Nízká energie zpětně odražených elektronů v LV SEM je příčinou nízkého zisku scintilačního detektoru.Pro získání kvalitního BSE obrazu v LV SEM je nutné dodat zpětně odraženým elektronům energii dostatečnou k vybuzení velkého množství scintilací ve scitilátoru. (cs)
Title
  • Computations of the Low Voltage BSE Detector in SEM
  • Výpočet nízkonapěťového BSE detektoru pro rastrovací elektronový mikroskop (cs)
  • Computations of the Low Voltage BSE Detector in SEM (en)
skos:prefLabel
  • Computations of the Low Voltage BSE Detector in SEM
  • Výpočet nízkonapěťového BSE detektoru pro rastrovací elektronový mikroskop (cs)
  • Computations of the Low Voltage BSE Detector in SEM (en)
skos:notation
  • RIV/00216305:26220/05:PU52283!RIV06-GA0-26220___
http://linked.open.../vavai/riv/strany
  • 337-340
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  • P(GA102/05/0886)
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  • 516085
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  • RIV/00216305:26220/05:PU52283
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  • low voltage scanning electron microscopy, LV SEM, backscattered electrons, detection (en)
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  • [439718BAD5C8]
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  • Brno
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  • Brno
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  • proceedings of the 11th Conference Student EEICT 2005
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  • Wandrol, Petr
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  • Vysoké učení technické v Brně
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  • 80-214-2889-9
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  • 26220
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