About: Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography

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About: Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper we study the possibility to realise surface relief gratings in thin chalcogenide glass films by holographic exposure using a pulsed KrF excimer laser. Gratings with a period of 540 nm and depths of 100 -300 nm were patterned at the surface of 1 lm thick films. Due to coupling of an incident near-infrared laser beam to waveguide modes a resonance-like polarisation dependent decline of transmission was observed at specific incidence angles. Just one laser pulse with a fluence of 12 mJ/cm2 per beam was sufficient to achieve the required grating parameters in sulphide glasses with low Tg. In this paper we study the possibility to realise surface relief gratings in thin chalcogenide glass films by holographic exposure using a pulsed KrF excimer laser. Gratings with a period of 540 nm and depths of 100 -300 nm were patterned at the surface of 1 lm thick films. Due to coupling of an incident near-infrared laser beam to waveguide modes a resonance-like polarisation dependent decline of transmission was observed at specific incidence angles. Just one laser pulse with a fluence of 12 mJ/cm2 per beam was sufficient to achieve the required grating parameters in sulphide glasses with low Tg. (en)
Title	Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography (en)
skos:prefLabel	Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography (en)
skos:notation	RIV/00216275:25310/09:00008347!RIV10-MSM-25310___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM0021627501)
http://linked.open...iv/cisloPeriodika	n
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Vlček, Miroslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Pardubice / Fakulta chemicko-technologická
http://linked.open...dnocenehoVysledku	310655
http://linked.open...ai/riv/idVysledku	RIV/00216275:25310/09:00008347
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	relief grating; chalcogenide glass; lithography (en)
http://linked.open.../riv/klicoveSlovo	lithography chalcogenide glass relief grating
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[2606337A3A2E]
http://linked.open...i/riv/nazevZdroje	Journal of Materials Science: Materials in Electronics
http://linked.open...in/vavai/riv/obor	CA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	20
http://linked.open...iv/tvurceVysledku	Vlček, Miroslav Fišerová, A. Brueckner, S. Fehling, S. Schroeter, S.
http://linked.open...n/vavai/riv/zamer	Aimed preparation of special compounds and materials and investigation of their physical and chemical properties and supramolecular structures
issn	0957-4522
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	25310
is http://linked.open...avai/riv/vysledek of	Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography

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