About: EUV radiation from gas-puff laser plasma focused by

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Prezentace nových výsledků vysoce intenzivního mikrofokusního EUV zdroje. Elipsoidální multifóliová optika fokusuje záření o energii 50 - 150 eV ze zdroje založeného na laserové plasmě. Popis a diskuze vývoje multifóliového kondenzoru, srovnání naměřených a předpovězených výsledků a EUV litografie a ablace materiálu. (cs) We present the recent progress in high intensity micro focused EUV beam generation. Ellipsoidal thin glass foils were used in Multi–foil optical systems for focusing radiation in 50 eV to 150 eV energy band from gas–puff laser plasma source. Multifoil optic (MFO) condenser was designed and tested for applications with Xe laser plasma gas–puff source. High intensity EUV beam focal spot was recorded, analyzed and compared with theoretical results from computer ray–tracing. Direct EUV lithography using radiation induced decomposition and ablation of TEFLON was studied. We present the recent progress in high intensity micro focused EUV beam generation. Ellipsoidal thin glass foils were used in Multi–foil optical systems for focusing radiation in 50 eV to 150 eV energy band from gas–puff laser plasma source. Multifoil optic (MFO) condenser was designed and tested for applications with Xe laser plasma gas–puff source. High intensity EUV beam focal spot was recorded, analyzed and compared with theoretical results from computer ray–tracing. Direct EUV lithography using radiation induced decomposition and ablation of TEFLON was studied. (en)
Title	EUV radiation from gas-puff laser plasma focused by EUV radiation from gas-puff laser plasma focused by (en) EUV záření z laserové plasmy fokusované multifóliovou optikou (cs)
skos:prefLabel	EUV radiation from gas-puff laser plasma focused by EUV radiation from gas-puff laser plasma focused by (en) EUV záření z laserové plasmy fokusované multifóliovou optikou (cs)
skos:notation	RIV/68407700:21340/06:04128227!RIV07-MSM-21340___
http://linked.open.../vavai/riv/strany	631705-1 ; 631705-9
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM6840770022)
http://linked.open...vai/riv/dodaniDat	2007
http://linked.open...aciTvurceVysledku	Pína, Ladislav Švéda, Libor Havlíková, Radka
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta jaderná a fyzikálně inženýrská
http://linked.open...dnocenehoVysledku	474646
http://linked.open...ai/riv/idVysledku	RIV/68407700:21340/06:04128227
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	EUV lithography; EUV radiation; gas-puff; laser plasma; x-ray optics (en)
http://linked.open.../riv/klicoveSlovo	laser plasma x-ray optics EUV radiation gas-puff EUV lithography
http://linked.open...ontrolniKodProRIV	[DE58C45195FF]
http://linked.open...v/mistoKonaniAkce	San Diego
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Advances in X-Ray/EUV Optics, Components, and Applications
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...UplatneniVysledku	2006
http://linked.open...iv/tvurceVysledku	Inneman, A. Pína, Ladislav Havlíková, Radka Švéda, Libor Semencová, V. Hudec, R. Bartnik, A. Fiedorowicz, H. Jakubczak, K.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2006-08-13 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Laserové systémy, záření a moderní optické aplikace
number of pages	9 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	0-8194-6396-5
http://localhost/t...ganizacniJednotka	21340

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