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Description
  • PtSi, Al and Cu contacts were optimized on minimal contact resistance using ion milling.
  • PtSi, Al and Cu contacts were optimized on minimal contact resistance using ion milling. (en)
Title
  • The Effect of Ion Milling on the Parameters of Copper Contacts
  • The Effect of Ion Milling on the Parameters of Copper Contacts (en)
skos:prefLabel
  • The Effect of Ion Milling on the Parameters of Copper Contacts
  • The Effect of Ion Milling on the Parameters of Copper Contacts (en)
skos:notation
  • RIV/68407700:21230/06:00120432!RIV10-MSM-21230___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM6840770017)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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  • 473099
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21230/06:00120432
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • aluminum; contact; copper; diode; ion milling; platinum silicide; silicon (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [02B2D6D35460]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Praha
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  • ISPS 06 Proceedings
http://linked.open...in/vavai/riv/obor
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http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Vobecký, Jan
  • Kolesnikov, Dmytro
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
issn
  • 1751-858X
number of pages
http://purl.org/ne...btex#hasPublisher
  • České vysoké učení technické v Praze. Ediční středisko
https://schema.org/isbn
  • 80-01-03524-7
http://localhost/t...ganizacniJednotka
  • 21230
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