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Description
  • Tvar křemíkových desek je měřena pomocí interferometrie v bílém světle s nejistotou přibližně 1 μm. Tímto způsobem je možné měřit zvlnění nebo odchylky křemíkových desek. (cs)
  • The form of silicon wafer is measured by white-light interferometry with measurement uncertainty about 1 μm. In this way waviness or deviations of the silicon wafers can be measured.
  • The form of silicon wafer is measured by white-light interferometry with measurement uncertainty about 1 μm. In this way waviness or deviations of the silicon wafers can be measured. (en)
Title
  • Measurement of the form of silicon wafers by white-light interferometry
  • Measurement of the form of silicon wafers by white-light interferometry (en)
  • Meření tvaru křemíkových desek pomocí interferometrie v bílém světle (cs)
skos:prefLabel
  • Measurement of the form of silicon wafers by white-light interferometry
  • Measurement of the form of silicon wafers by white-light interferometry (en)
  • Meření tvaru křemíkových desek pomocí interferometrie v bílém světle (cs)
skos:notation
  • RIV/68378271:_____/08:00321023!RIV09-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(KAN301370701), Z(AV0Z10100522), Z(MSM6198959213)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 378155
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/08:00321023
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • white light interferometry; waviness; form; silicon wafer (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [9E92E5FC689C]
http://linked.open...v/mistoKonaniAkce
  • Rožnov pod Radhoštěm
http://linked.open...i/riv/mistoVydani
  • Rožnov pod Radhoštěm
http://linked.open...i/riv/nazevZdroje
  • SILICON 2008. 11th Scientific and Business Conference
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Chmelíčková, Hana
  • Pavlíček, Pavel
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • TECON Scientific
https://schema.org/isbn
  • 978-80-254-3278-5
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