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Description
| - In this work the mixture of oxygen and a small amount (0-5%) of methane was studied. The measurements were carried out in low-pressure (6.5 Pa) capacitively coupled RF discharge. Positive ions and neutral particles were detected by mass spectrometer and ion energy analyzer. O2+ was the dominating ion in the discharge. Its amount was significantly decreased when a small amount of methane was added. H3O+ and carbon containing ions as C2H7+, CHO+ (C2H5+), CH3+ and CO+ were consequently detected. The flux of neutral particles were composed of dominant O2 which decreased with increasing amount of methane, and expected important product species as H2O, CO2 and CO.
- In this work the mixture of oxygen and a small amount (0-5%) of methane was studied. The measurements were carried out in low-pressure (6.5 Pa) capacitively coupled RF discharge. Positive ions and neutral particles were detected by mass spectrometer and ion energy analyzer. O2+ was the dominating ion in the discharge. Its amount was significantly decreased when a small amount of methane was added. H3O+ and carbon containing ions as C2H7+, CHO+ (C2H5+), CH3+ and CO+ were consequently detected. The flux of neutral particles were composed of dominant O2 which decreased with increasing amount of methane, and expected important product species as H2O, CO2 and CO. (en)
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Title
| - Influence of methane on capacitively coupled oxygen discharge
- Influence of methane on capacitively coupled oxygen discharge (en)
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skos:prefLabel
| - Influence of methane on capacitively coupled oxygen discharge
- Influence of methane on capacitively coupled oxygen discharge (en)
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skos:notation
| - RIV/00216224:14310/07:00020196!RIV10-MSM-14310___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GD202/03/H162), Z(MSM0021622411)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216224:14310/07:00020196
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - oxygen; methane; capacitively coupled; plasma (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - 16th Symposium on Application of Plasma Processes - Book of Abstracts
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
| |
http://linked.open...iv/tvurceVysledku
| - Dvořák, Pavel
- Janča, Jan
- Doležal, Vojtěch
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - Union of Slovak Mathematicians and Physicists
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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