About: Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch     Goto   Sponge   NotDistinct   Permalink

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  • In present paper we describe a synthesis of carbon nanotubes in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon on Si/SiO2/Fe substrate. Using this relatively novel method and under optimized conditions pure, well aligned and long nanotubes were grown with high deposition rate. The layers were analyzed by scanning electron microscopy and discharge plasma was analyzed by optical emission spectroscopy.
  • In present paper we describe a synthesis of carbon nanotubes in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon on Si/SiO2/Fe substrate. Using this relatively novel method and under optimized conditions pure, well aligned and long nanotubes were grown with high deposition rate. The layers were analyzed by scanning electron microscopy and discharge plasma was analyzed by optical emission spectroscopy. (en)
Title
  • Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch
  • Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch (en)
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  • Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch
  • Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch (en)
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  • RIV/00216224:14310/05:00012989!RIV10-GA0-14310___
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  • P(GA202/05/0607)
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  • 536166
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  • RIV/00216224:14310/05:00012989
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  • carbon nanotubes; microwave discharge; scanning electron microscopy (en)
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  • [4507CBF935BE]
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  • Podbanské
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  • Bratislava
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  • Proceedings of 15th Symposion on Application of Plasma Processes
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  • Buršík, Jiří
  • Eliáš, Marek
  • Jašek, Ondřej
  • Kudrle, Vít
  • Zajíčková, Lenka
  • Matějková, Jiřina
  • Rek, Antonín
  • Bublan, Martin
  • Kadlěčíková, Magdaléna
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  • Univerzita Komenského v Bratislave. Vydavateľstvo
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  • 80-223-2018-8
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  • 14310
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