About: Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere

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About: Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere Goto Sponge Distinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The process we used was d.c. magnetron sputtering, and we studied both the conventional process, using a constant flow of oxygen, and the process in which we pulsed the reactive gas. Square regulation signal with different pulsing periods (T) and oxygen injection time (ton) was used in the reactive gas pulsing (RGP), while the partial argon pressure was kept constant for all depositions. The process we used was d.c. magnetron sputtering, and we studied both the conventional process, using a constant flow of oxygen, and the process in which we pulsed the reactive gas. Square regulation signal with different pulsing periods (T) and oxygen injection time (ton) was used in the reactive gas pulsing (RGP), while the partial argon pressure was kept constant for all depositions. (en) Studium katodového napětí při naprašování s pulzováním kyslíku. (cs)
Title	Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere Studium katodového napětí při naprašování s pulzováním reaktivního plynu: W target a Ar-O2 atmosféra (cs) Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere (en)
skos:prefLabel	Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere Studium katodového napětí při naprašování s pulzováním reaktivního plynu: W target a Ar-O2 atmosféra (cs) Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere (en)
skos:notation	RIV/68407700:21260/07:06139518!RIV08-MSM-21260___
http://linked.open.../vavai/riv/strany	62;68
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM6840770038)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Polcar, Tomáš
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta dopravní
http://linked.open...dnocenehoVysledku	453317
http://linked.open...ai/riv/idVysledku	RIV/68407700:21260/07:06139518
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	coating; discharge; reactive sputtering; tungsten oxide (en)
http://linked.open.../riv/klicoveSlovo	reactive sputtering discharge coating tungsten oxide
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[38BDE0B27EA6]
http://linked.open...i/riv/nazevZdroje	Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	4
http://linked.open...iv/tvurceVysledku	Cavaleiro, A. Polcar, Tomáš Parreira, N. M. G.
http://linked.open...n/vavai/riv/zamer	Decision Making and Control for Manufacturing III
issn	1612-8850
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	21260
is http://linked.open...avai/riv/vysledek of	Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere Study of the Cathode Potential in a Sputtering Discharge by Pulsing the Reactive Gas: Case of a W Target in an Ar-O2 Atmosphere

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