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Overlayer thickness determination by XPS using the multiline approach
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Description
We consider here a possibility of using more than two intensities for a given element, in the procedure of thickness determination.
We consider here a possibility of using more than two intensities for a given element, in the procedure of thickness determination.
(en)
Ke stanovení tloušťek tenkých vrstev navrhujeme použití více než dvou linií pro daný prvek.
(cs)
Title
Overlayer thickness determination by XPS using the multiline approach
Overlayer thickness determination by XPS using the multiline approach
(en)
Určování tlouštěk tenkých vrstev z fotoemisních linií
(cs)
skos:prefLabel
Overlayer thickness determination by XPS using the multiline approach
Overlayer thickness determination by XPS using the multiline approach
(en)
Určování tlouštěk tenkých vrstev z fotoemisních linií
(cs)
skos:notation
RIV/68378271:_____/08:00322013!RIV09-AV0-68378271
http://linked.open...avai/riv/aktivita
P
Z
http://linked.open...avai/riv/aktivity
P(GA202/06/0459), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika
3
http://linked.open...vai/riv/dodaniDat
2009
http://linked.open...aciTvurceVysledku
Zemek, Josef
http://linked.open.../riv/druhVysledku
J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju
S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele
Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku
385637
http://linked.open...ai/riv/idVysledku
RIV/68378271:_____/08:00322013
http://linked.open...riv/jazykVysledku
eng - angličtina
http://linked.open.../riv/klicovaSlova
computer simulations; electron-solid interactions; Monte Carlo simulations; x-ray photoelectron spectroscopy
(en)
http://linked.open.../riv/klicoveSlovo
computer simulations
Monte Carlo simulations
x-ray photoelectron spectroscopy
electron-solid interactions
http://linked.open...odStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
[D4F62B4D918A]
http://linked.open...i/riv/nazevZdroje
Surface and Interface Analysis
http://linked.open...in/vavai/riv/obor
BM
http://linked.open...ichTvurcuVysledku
1
(
xsd:int
)
http://linked.open...cetTvurcuVysledku
2
(
xsd:int
)
http://linked.open...vavai/riv/projekt
Electron interactions at unordered solid surfaces
http://linked.open...UplatneniVysledku
2008
http://linked.open...v/svazekPeriodika
41
http://linked.open...iv/tvurceVysledku
Zemek, Josef
Jablonski, A.
http://linked.open...ain/vavai/riv/wos
000263750400008
http://linked.open...n/vavai/riv/zamer
Physics and technology of nanostructures, surfaces and thin films
issn
0142-2421
number of pages
12
(
xsd:int
)
is
http://linked.open...avai/riv/vysledek
of
Overlayer thickness determination by XPS using the multiline approach
Overlayer thickness determination by XPS using the multiline approach
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