About: Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	High pressure of gas mostly water vapour, with pressure range from 0.1 Pa to 80 Pa in the first differentially pumped chamber and 10 Pa to over 2000 Pa in the specimen chamber is used in variable pressure scanning electron microscopes (VP-SEM) such as our experimental AQUASEM II equipped with a combined YAG-BSE and ionization detector of SE. The gas environment causes unwanted primary electron beam diffusion, but it also supports gas ionization cascade amplification of the signal of secondary electrons (SE), accelerated by the applied field of detection electrode of the ionisation detector. High pressure of gas mostly water vapour, with pressure range from 0.1 Pa to 80 Pa in the first differentially pumped chamber and 10 Pa to over 2000 Pa in the specimen chamber is used in variable pressure scanning electron microscopes (VP-SEM) such as our experimental AQUASEM II equipped with a combined YAG-BSE and ionization detector of SE. The gas environment causes unwanted primary electron beam diffusion, but it also supports gas ionization cascade amplification of the signal of secondary electrons (SE), accelerated by the applied field of detection electrode of the ionisation detector. (en)
Title	Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM (en)
skos:prefLabel	Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM (en)
skos:notation	RIV/68081731:_____/11:00368930!RIV12-AV0-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GAP102/10/1410), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	Suppl. 2
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Neděla, Vilém Konvalina, Ivo
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	229435
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/11:00368930
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	variable pressure scanning electron microscopes (VP-SEM); AQUASEM II; simlulation (en)
http://linked.open.../riv/klicoveSlovo	variable pressure scanning electron microscopes (VP-SEM) AQUASEM II simlulation
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[D3B8C23F49BD]
http://linked.open...i/riv/nazevZdroje	Microscopy and Microanalysis
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	The study of the influence of magnetic and electric fields for amplification of secondary electron signals detected by a novel detector in VP-SEM.
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	17
http://linked.open...iv/tvurceVysledku	Konvalina, Ivo Neděla, Vilém Zlámal, J. Lencová, B.
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	1431-9276
number of pages	2 (xsd:int)
http://bibframe.org/vocab/doi	10.1017/S1431927611005472
is http://linked.open...avai/riv/vysledek of	Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM

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