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| - The article deals with the concept of secondary electron scintillation detector in Environmental SEM. For secondary electrons detection by scintillation detector, the voltage of about 10 kV attached to the conductive surface layer of the scintillator accelerates secondary electrons to give them sufficient energy for efficient scintillation. However, presence of this voltage requires pressure less than 5 Pa in the scintillator room to avoid discharges. Therefore, our design of secondary electron detector is based on scintillator location in a room with low pressure. This room is separated from the specimen chamber by the system of pressure limiting apertures that allow pass secondary electrons and inhibit the gas flow. The rooms between the apertures and scintillator are vacuum pumped. The results show that this detector provides new possibilities of electrons detection in Environmental SEM.
- The article deals with the concept of secondary electron scintillation detector in Environmental SEM. For secondary electrons detection by scintillation detector, the voltage of about 10 kV attached to the conductive surface layer of the scintillator accelerates secondary electrons to give them sufficient energy for efficient scintillation. However, presence of this voltage requires pressure less than 5 Pa in the scintillator room to avoid discharges. Therefore, our design of secondary electron detector is based on scintillator location in a room with low pressure. This room is separated from the specimen chamber by the system of pressure limiting apertures that allow pass secondary electrons and inhibit the gas flow. The rooms between the apertures and scintillator are vacuum pumped. The results show that this detector provides new possibilities of electrons detection in Environmental SEM. (en)
- Článek se zabývá konceptem scintilačního detektoru sekundárních elektronů v environmentální SEM. Pro detekci sekundárních elektronů scintilačním detektorem musí být na povrchu scintilátoru napětí přibližně 10 kV, které urychluje sekundární elektrony na energii dostatečnou k účinné scintilaci. Avšak přítomnost tohoto napětí vyžaduje k zamezení výbojů v plynu tlak menší než 5 Pa v prostoru scintilátoru. Konstrukce našeho detektoru je proto založena na umístění scintilátoru do prostoru s nízkým tlakem. Tento prostor je oddělen od komory vzorku systémem aperturních clon, které propouští sekundární elektrony a omezují proudění plynu. Prostory mezi clonkami a scintilátorem jsou vakuově čerpány. Výsledky ukazují, že tento detektor poskytuje nové možnosti detekce elektronů v environmentálním SEM. (cs)
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| Title
| - Scintillation Detector in Environmental SEM
- Scintilační detektor v environmentální SEM (cs)
- Scintillation Detector in Environmental SEM (en)
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| skos:prefLabel
| - Scintillation Detector in Environmental SEM
- Scintilační detektor v environmentální SEM (cs)
- Scintillation Detector in Environmental SEM (en)
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| skos:notation
| - RIV/68081731:_____/05:00022402!RIV06-GA0-68081731
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| http://linked.open.../vavai/riv/strany
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/68081731:_____/05:00022402
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - scintillation detector; secondary electrons (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...v/mistoKonaniAkce
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| http://linked.open...i/riv/mistoVydani
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| http://linked.open...i/riv/nazevZdroje
| - Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
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| http://linked.open...iv/tvurceVysledku
| - Autrata, Rudolf
- Jirák, Josef
- Skřivánek, Jiří
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| http://linked.open...vavai/riv/typAkce
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| http://linked.open.../riv/zahajeniAkce
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| number of pages
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| http://purl.org/ne...btex#hasPublisher
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| is http://linked.open...avai/riv/vysledek
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