About: SEM acquired electronic contrast of doped areas in semiconductors and its interpretation.

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	New experimental data are reviewed that throw more light on explanation of the electronic contrast, mediated by secondary electrons in the SEM and visualizing the doped areas in semiconductors. Observation of p.sup.+./sup. doped patterns on the n-type Si (111) was made in cathode lens equipped very low energy SEM both under UHV and standard vacuum conditions. Further, the same structure was examined in the Auger electron spectrometer with a scanned primary beam. Data were obtained for the as-inserted specimen aswell as for that in-situ cleaned by a ion beam. When interpreting the observations, the structure was found not to behave as a clean crystal with the local differences in the inner potential compensated via above-surface patch fields but, on contrary, underlined is the role of subsurface fields, generated by semiconductor-contaminantion or semiconductor-layer contacts. New experimental data are reviewed that throw more light on explanation of the electronic contrast, mediated by secondary electrons in the SEM and visualizing the doped areas in semiconductors. Observation of p.sup.+./sup. doped patterns on the n-type Si (111) was made in cathode lens equipped very low energy SEM both under UHV and standard vacuum conditions. Further, the same structure was examined in the Auger electron spectrometer with a scanned primary beam. Data were obtained for the as-inserted specimen aswell as for that in-situ cleaned by a ion beam. When interpreting the observations, the structure was found not to behave as a clean crystal with the local differences in the inner potential compensated via above-surface patch fields but, on contrary, underlined is the role of subsurface fields, generated by semiconductor-contaminantion or semiconductor-layer contacts. (en)
Title	SEM acquired electronic contrast of doped areas in semiconductors and its interpretation. SEM acquired electronic contrast of doped areas in semiconductors and its interpretation. (en)
skos:prefLabel	SEM acquired electronic contrast of doped areas in semiconductors and its interpretation. SEM acquired electronic contrast of doped areas in semiconductors and its interpretation. (en)
skos:notation	RIV/68081731:_____/02:12020095!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany	9 ; 12
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA1065901), Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Frank, Luděk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	663237
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/02:12020095
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	secondary electrons; electronic contrast; semiconductors (en)
http://linked.open.../riv/klicoveSlovo	secondary electrons semiconductors electronic contrast
http://linked.open...ontrolniKodProRIV	[3BD43F348877]
http://linked.open...v/mistoKonaniAkce	Toyama [JP]
http://linked.open...i/riv/mistoVydani	Toyama
http://linked.open...i/riv/nazevZdroje	Proceedings of seminar on nanotechnology for fabrication of hybrid materials.
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Wave-optical contrasts in the scanning electron microscope
http://linked.open...UplatneniVysledku	2002
http://linked.open...iv/tvurceVysledku	Müllerová, Ilona Frank, Luděk El-Gomati, M. Jayakody, H.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2002-11-06 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	JPJSMA

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