About: Imaging of Specimens at Optimized Low and Very Low Energies in Scanning Electron Microscopes.

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About: Imaging of Specimens at Optimized Low and Very Low Energies in Scanning Electron Microscopes. Goto Sponge Distinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The modern trend towards low electron energies in scanning electron microscopy (SEM), characterised by lowering the acceleration voltages in low-voltage SEM (LVSEM) or by utilising a retarding-field optical element in low-energy SEM (LESEM), makes the energy range where new contrasts appear accessible. This range is further extended by a scanning low-energy electron microscope (SLEEM) fitted with a cathode lens that achieves nearly constant spatial resolution throughout the energy scale. This enables one to optimise freely the electron beam energy according to the given task. At low energies, there exist classes of image contrast that make particular specimen data visible most effectively or even exclusively within certain energy intervals or at certain energy values. Some contrasts are well understood and can presently be utilised for practical surface examinations, but others have not yet been reliably explained and therefore supplementary experiments are needed. The modern trend towards low electron energies in scanning electron microscopy (SEM), characterised by lowering the acceleration voltages in low-voltage SEM (LVSEM) or by utilising a retarding-field optical element in low-energy SEM (LESEM), makes the energy range where new contrasts appear accessible. This range is further extended by a scanning low-energy electron microscope (SLEEM) fitted with a cathode lens that achieves nearly constant spatial resolution throughout the energy scale. This enables one to optimise freely the electron beam energy according to the given task. At low energies, there exist classes of image contrast that make particular specimen data visible most effectively or even exclusively within certain energy intervals or at certain energy values. Some contrasts are well understood and can presently be utilised for practical surface examinations, but others have not yet been reliably explained and therefore supplementary experiments are needed. (en)
Title	Imaging of Specimens at Optimized Low and Very Low Energies in Scanning Electron Microscopes. Imaging of Specimens at Optimized Low and Very Low Energies in Scanning Electron Microscopes. (en)
skos:prefLabel	Imaging of Specimens at Optimized Low and Very Low Energies in Scanning Electron Microscopes. Imaging of Specimens at Optimized Low and Very Low Energies in Scanning Electron Microscopes. (en)
skos:notation	RIV/68081731:_____/01:12010017!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany	379;394
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA1065901), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika	6
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Müllerová, Ilona
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	682381
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/01:12010017
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	contrast mechanisms; low electron energies; scanning electron microscope (en)
http://linked.open.../riv/klicoveSlovo	scanning electron microscope contrast mechanisms low electron energies
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[B40C3C50CA90]
http://linked.open...i/riv/nazevZdroje	Scanning
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	1 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Wave-optical contrasts in the scanning electron microscope
http://linked.open...UplatneniVysledku	2001
http://linked.open...v/svazekPeriodika	23
http://linked.open...iv/tvurceVysledku	Müllerová, Ilona
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
issn	0161-0457
number of pages	16 (xsd:int)

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