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  • The paper deals with calibration of magnification in a cathode lens equipped SEM, which provides a high resolution in the energy range below 2000 eV, where both the charging-up and edge effect phenomena, complicating the measurement of dimensions, are suppressed. An analytical expression for the image magnification, in the dependence on the electron impact energy and the working distance, is derived and verified with respect to the measured values. Finally, a procedure suitable for the routine calibration is proposed.
  • The paper deals with calibration of magnification in a cathode lens equipped SEM, which provides a high resolution in the energy range below 2000 eV, where both the charging-up and edge effect phenomena, complicating the measurement of dimensions, are suppressed. An analytical expression for the image magnification, in the dependence on the electron impact energy and the working distance, is derived and verified with respect to the measured values. Finally, a procedure suitable for the routine calibration is proposed. (en)
Title
  • Dimension measurement in a cathode lens equipped low-energy SEM.
  • Dimension measurement in a cathode lens equipped low-energy SEM. (en)
skos:prefLabel
  • Dimension measurement in a cathode lens equipped low-energy SEM.
  • Dimension measurement in a cathode lens equipped low-energy SEM. (en)
skos:notation
  • RIV/68081731:_____/00:12000015!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • I199;I200
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  • P(IBS2065017), Z(AV0Z2065902)
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  • 708841
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  • RIV/68081731:_____/00:12000015
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  • N/A (en)
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  • [F6420539CF4B]
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  • Brno [CZ]
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  • Brno
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  • Proceedings of the 12th European Congress on Electron Microscopy.
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  • Oral, Martin
  • Müllerová, Ilona
  • Frank, Luděk
  • Hutař, Otakar
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number of pages
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  • Czechoslovak Society for Electron Microscopy
https://schema.org/isbn
  • 80-238-5503-4
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