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  • Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely.
  • Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely. (en)
Title
  • Mechanical properties of Al thin films measured by microcompression
  • Mechanical properties of Al thin films measured by microcompression (en)
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  • Mechanical properties of Al thin films measured by microcompression
  • Mechanical properties of Al thin films measured by microcompression (en)
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  • RIV/68081723:_____/11:00369042!RIV12-AV0-68081723
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  • Z(AV0Z20410507)
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  • 211234
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  • RIV/68081723:_____/11:00369042
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  • focused ion beam; pillars; Al thin film; nanoindenter (en)
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http://linked.open...ontrolniKodProRIV
  • [E9F3C7083FE9]
http://linked.open...v/mistoKonaniAkce
  • Velké Bílovice
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  • Brno, Česká republika
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  • Applied Mechanics 2011
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...UplatneniVysledku
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  • Kruml, Tomáš
  • Kuběna, Ivo
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number of pages
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  • Ústav fyziky materiálů AV ČR
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  • 978-80-87434-03-1
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