About: White-light spectral interferometric technique used to measure thickness of thin films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present a white-light spectral interferometric technique for measuring the thickness of a thin film on a substrate. First, the channeled spectrum is expressed analytically for a setup of a slightly dispersive Michelson interferometer with a cube beam splitter of given effective thickness and a fiber-optic spectrometer of a Gaussian response function when one of the interferometer mirrors is replaced by the thin film on the substrate. Then we model the wavelength dependences of the reflectance, the visibility of the spectral interference fringes, the phase change on reflection and the so-called nonlinear phase function, respectively, for a SiO2 thin film on a silicon wafer. In the modeling, the optical constants are known and multiple reflection within the thin-film structure is taken into account. Second, we perform interferometric experiments with a SiO thin film on aluminium and the SiO2 thin film on the silicon wafer. Channeled spectra are recorded for determining the thin-film thickness, provid We present a white-light spectral interferometric technique for measuring the thickness of a thin film on a substrate. First, the channeled spectrum is expressed analytically for a setup of a slightly dispersive Michelson interferometer with a cube beam splitter of given effective thickness and a fiber-optic spectrometer of a Gaussian response function when one of the interferometer mirrors is replaced by the thin film on the substrate. Then we model the wavelength dependences of the reflectance, the visibility of the spectral interference fringes, the phase change on reflection and the so-called nonlinear phase function, respectively, for a SiO2 thin film on a silicon wafer. In the modeling, the optical constants are known and multiple reflection within the thin-film structure is taken into account. Second, we perform interferometric experiments with a SiO thin film on aluminium and the SiO2 thin film on the silicon wafer. Channeled spectra are recorded for determining the thin-film thickness, provid (en) Metody spektrální interferometrie v bílem světle využívané k měření tloušťky tenkých vrstev (cs)
Title	White-light spectral interferometric technique used to measure thickness of thin films Metody spektrální interferometrie v bílem světle využívané k měření tloušťky tenkých vrstev (cs) White-light spectral interferometric technique used to measure thickness of thin films (en)
skos:prefLabel	White-light spectral interferometric technique used to measure thickness of thin films Metody spektrální interferometrie v bílem světle využívané k měření tloušťky tenkých vrstev (cs) White-light spectral interferometric technique used to measure thickness of thin films (en)
skos:notation	RIV/61989100:27350/07:00016596!RIV08-GA0-27350___
http://linked.open.../vavai/riv/strany	661605-661605
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/06/0531), Z(MSM6198910016)
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Hlubina, Petr Ciprian, Dalibor Lesňák, Michal Luňáček, Jiří
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoká škola báňská - Technická univerzita Ostrava / Hornicko-geologická fakulta
http://linked.open...dnocenehoVysledku	461265
http://linked.open...ai/riv/idVysledku	RIV/61989100:27350/07:00016596
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	spectral interferometry; thin film thickness (en)
http://linked.open.../riv/klicoveSlovo	thin film thickness spectral interferometry
http://linked.open...ontrolniKodProRIV	[6FB937C13AC1]
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Proceedings of SPIE
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Reflection and waveguiding effects in magnetic nanostructures
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Ciprian, Dalibor Hlubina, Petr Luňáček, Jiří Lesňák, Michal Chlebus, R.
http://linked.open...n/vavai/riv/zamer	Syntéza, struktura a vlastnosti nanomateriálů založených na bázi interkalovaných fylosylikátů
issn	0277-786X
number of pages	9 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE-The International Society for Optical Engineering
http://localhost/t...ganizacniJednotka	27350
is http://linked.open...avai/riv/vysledek of	White-light spectral interferometric technique used to measure thickness of thin films White-light spectral interferometric technique used to measure thickness of thin films White-light spectral interferometric technique used to measure thickness of thin films

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