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  • The vapour pressure of four metal-organic precursors, diethylzinc, triethylantimony, trimethylgallium and trimethylaluminium used in the MOVPE processes was measured by a static method in the technologically important temperature range from 238 to 293 K. The experimental data were fitted by the Antoine equation and represent update values of the present day high purity materials providing comparison with the previously published data.
  • The vapour pressure of four metal-organic precursors, diethylzinc, triethylantimony, trimethylgallium and trimethylaluminium used in the MOVPE processes was measured by a static method in the technologically important temperature range from 238 to 293 K. The experimental data were fitted by the Antoine equation and represent update values of the present day high purity materials providing comparison with the previously published data. (en)
Title
  • Vapour pressure of metal-organic precursors
  • Vapour pressure of metal-organic precursors (en)
skos:prefLabel
  • Vapour pressure of metal-organic precursors
  • Vapour pressure of metal-organic precursors (en)
skos:notation
  • RIV/60461373:22340/03:00007828!RIV/2004/GA0/223404/N
http://linked.open.../vavai/riv/strany
  • 99-107
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/99/0414)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 632710
http://linked.open...ai/riv/idVysledku
  • RIV/60461373:22340/03:00007828
http://linked.open...riv/jazykVysledku
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  • vapour pressure; static method; organometallic precursors; MOVPE; (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [B1899C7BD1E4]
http://linked.open...i/riv/nazevZdroje
  • Journal of Crystal Growth
http://linked.open...in/vavai/riv/obor
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 248
http://linked.open...iv/tvurceVysledku
  • Hulicius, Eduard
  • Pangrác, Jiří
  • Růžička, Vlastimil
  • Růžička, Květoslav
  • Fulem, Michal
  • Melichar, Karel
  • Šimeček, Tomislav
  • Rushworth, S. A.
  • Smith, L. M.
issn
  • 0022-0248
number of pages
http://localhost/t...ganizacniJednotka
  • 22340
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